Category Archives: Wafer Level Packaging

(November 15, 2010) — In his presentation at the MEPTEC Semiconductor Packaging Roadmaps conference (Santa Clara, CA; 11/10/10), Lee Smith, VP, business development at Amkor, made a case for full supply chain collaboration as the industry moves to 3D ICs with TSVs. Among the drivers for collaboration in 3D packaging development are the rising R&D costs and capital intensity, shorter product and technology life cycles and the attendant margin "squeeze" along with the consolidation of demand to achieve ROI requirements.

One collaboration integrated design manufacturer (IDM)/outsourced semiconductor assembly and test (OSAT) provider case study is Amkor’s work with TI; in July 2010, the companies announced qualification and high-volume manufacturing of fine pitch copper pillar technology. Smith said that the new lead-free technology enables bump pitches of ≤50µm and is cost competitive with wire bonding. 

Listen to Lee Smith’s interview: Download or Play Now

In this podcast interview, Smith discusses the three generations in the transition to 3D packaging and how the OSATs shape the development roadmap. In the first generation of die stacking, it was the memory industry and their OSAT suppliers who collaborated; then logic plus memory integration led to further collaboration. In the second generation (package stacking), OEMs were the key drivers in initiating collaboration: the logic, memory, OSATs, plus EMS industry, all enabled package stack solution in high-volumes. And as the industry enters the third stage of 3D packaging — a complete 3D architecture with TSVs — Smith says that we need complete supply chain collaboration: EDA tool suppliers, equipment/materials suppliers, logic, memory, fabless, IDMs, and the SATs, to develop and deploy the technologies.

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(November 15, 2010) — Japan Marketing Survey Co. Ltd. (JMS) published the report "IC Packaging & Substrate Report 2010." It covers production trends of major semiconductor package assemblers and substrate makers and the package market size through 2014, based on package type and electronics volume.

The production trend of major assemblers and substrate manufacturers section covers 30 major IC package assemblers and 16 major substrate manufacturers.

The 2008-2014 market size forecast includes analysis of the IC package assembly market trends on a quantity basis; by ball grid array (BGA), chipscale package (CSP), and system-in-package (SiP) type; by interconnection technology; by substrate type; by ball pitch size; and by IC type. The report also looks at substrate market trends by volume (SQM and PCs) and value basis; by BGA and CSP type; and by type and layer of substrate.

Japan Marketing Survey Co Ltd provides market surveys and consulting services, market survey related publishing, and technology surveys and consulting services. To order the report, visit http://www.jms21.co.jp/english.ver/report/syoseki/2010report/IC_PKG2010.htm

More IC packaging market analysis:

Packaging providers outgrowing semiconductor fab market: Gartner forecast

Flip chip and wafer-level packaging future, Alan Huffman

Advanced IC packaging report covers key techs, markets

 3D roadmaps begin to converge

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(November 10, 2010 – BUSINESS WIRE) — InvenSense Inc. released its MPU-6000 product family. The MPU-6000 MEMS motion sensing technology integrates a 3-axis gyroscope and a 3-axis accelerometer on the same silicon die together with an onboard Digital Motion Processor (DMP) capable of processing complex 9-axis sensor fusion algorithms.

The MPU-6000 family of MotionProcessors eliminates the challenges associated with selection and integration of many different motion sensors that could require signal conditioning, sensor fusion and factory calibration. It features integrated 9-axis sensor fusion algorithms that utilize an external magnetometer output through its master I2C bus to provide dead reckoning functionality. The MPU-6000 is offered in the same 4 x 4 x 0.9mm QFN package and the same pinout as the current MPU-3000 product family of integrated 3-axis gyroscopes. It also offers ease of integration and interface to various application processors through an I2C or SPI bus and its standard MotionProcessing Library (MPL) and APIs.

With increasing popularity of motion sensors in everyday consumer electronics, motion processing is quickly expanding into smart phones, tablets, TV remotes, handheld gaming devices and gaming consoles, digital still and video cameras and many other consumer products. Adoption of motion processing functions in smartphones, tablets and many other portable consumer electronic devices is promising to bring a host of new and enhanced functionalities and benefits to consumers including: precise sensing of hand jitter to improve image quality and video stability; GPS dead reckoning for vehicles and indoor pedestrian navigation and new motion-based user interfaces, augmented reality and more immersive gaming experiences to name a few. However, market adoption has been slow primarily due to a lack of available off-the-shelf solutions that could be adopted quickly and easily by OEMs. Today, developing an integrated motion sensor solution requires using various components offered by many different suppliers, adding signal conditioning, developing proprietary sensor fusion algorithms, processing overhead and resource allocation and understanding the complex IP challenges in this space, all of which adds cost and delays in adoption by end customers. 

Other recent consumer MEMS announcements

Kionix extends reach in inertial MEMS sensors, debuts gyros for consumer apps, new accelerometers

VTI expands into consumer gyros and timing devices

Although integrated 3-axis accelerometers have been around since early 2000 in consumer electronics devices and have been offered by a variety of companies, high performance consumer grade gyroscopes have presented many more technical challenges. InvenSense introduced integrated 3-axis gyroscopes last year. A key benefit of an integrated 6-axis solution on the same chip is the perfect alignment of all axes between the gyroscope and accelerometer that will eliminate costly factory calibrations that are currently required. Further, it has eliminated the need for a separate, standalone 3-axis accelerometer and is offered in the same exact package and footprint as the current 3-axis gyroscope from InvenSense. Last, the addition of a master I2C port for inputting the 3-axis compass output can allow a complete 9-axis sensor fusion using the InvenSense proprietary and patent pending DMP and MPL solution. The InvenSense MPL is a software layer that makes the integration and interfaces to an application processor a very easy task without requiring expertise in the field of motion processing.

"InvenSense, with the development of the Nasiri-Fabrication process and the building of a flexible manufacturing infrastructure, has established an enabling platform to support the integration of multiple axis of motion detection in a single chip," said JC Eloy, CEO of Yole Développement. "InvenSense is developing in parallel of the silicon device, software functions and applications software that will simplify the integration of motion processors into modules and systems, paving the way towards a larger market and wide diffusion of motion processors into consumer electronics."

InvenSense leverages its Nasiri-Fabrication platform for the product, allowing direct integration of MEMS mechanical structures and CMOS electronics at the wafer level, making it a typical fabless semiconductor supply chain. The MPU product family leverages 8" fabrication lines from world class foundries and in-house high volume test and calibration facilities in Taiwan to support the high volume requirements of the consumer marketplace. The MPU-6000 will include the company’s proprietary and patent pending DMP engine, enabling 9-axis sensor fusion and MPL APIs to deliver the only complete solution available in the market today.

The MPU-6000 includes a range of dynamic full scale capabilities at ±250dps, ±500dps, ±1000dps, and a top range of ±2,000dps for angular rate sensing and ±2g, ±4g, ±8g and ±16g for linear acceleration sensing. This permits the use of a single MotionProcessing solution to perform every possible motion application from slow motion menu selection to very fast hand gestures, all with 16-bit resolution. Rate noise performance sets the industry standard at 0.005 degrees/sec/√Hz, providing the highest-quality user experience for image stabilization, pointing and gaming applications. High-accuracy factory calibration targeting ±1% initial sensitivity reduces customer calibration requirements. The gyroscope operates at a resonant frequency above 27kHz making the MPU-6000 immune to interference from audible frequencies (20-20,000Hz) such as music, phone ringers, crowds or white noise, which becomes critical for noise sensitive applications such as image stabilization. Other industry-leading features include the 4 x 4 x 0.9mm plastic 24-pin QFN package, on-chip 16-bit ADCs, programmable digital filters, a precision clock with 2% accuracy over -40°C to +85°C, an embedded temperature sensor, programmable interrupts, and a low 5.5mA current consumption. Parts are available with I2C and SPI serial interfaces, a VDD operating range of 2.5 to 3.6V, and a VLOGIC interface voltage from 1.71 to 3.6V.

The MPU-6000 is available for immediate selected customer sampling.

InvenSense provides motion processors for the consumer electronics market. For more information visit InvenSense at http://www.invensense.com.

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(November 10, 2010) — Package-on-package (PoP), implemented with flip chip package assembly, is meeting a lot of the requirements for next-generation mobile devices. Challenges remain, namely using fine pitch underfill, brittleness of ultra low-k (ULK) dielectrics, and shorting between adjacent bumps. Craig Mitchell, Tessera, examines the lucrative 3D packaging step and how to face the aforementioned challenges.

For years, the mobile phone market has been driving the development of the advanced semiconductor packaging industry. This is primarily due to the desire of original equipment manufacturers (OEMs) to accommodate the end user’s insatiable demand for functionality, performance and miniaturized form factors. The mobile phone market’s influence was first seen through the demand and subsequent adoption of chip scale packaging (CSP), followed closely by multi-chip packaging and now package-on-package (PoP) structures for manufacturing. This trend is most notable in the smart phone segment, where applications, baseband and multimedia processors are increasingly adopting flip chip packaging to satisfy size, performance, and, in some cases, cost requirements. The smart phone market is the fastest-growing segment of the 1.3-billion-unit mobile phone market, anticipated to grow at a CAGR of 25% through 2014, according to Gartner. It also tends to be the most profitable segment of the market and is gaining increased attention from wireless carriers, handset manufacturers, semiconductor manufacturers and subcontract assemblers alike.

The growing functionality and complexity of these handheld devices is driving the need for more advanced packaging interconnect technologies that are capable of efficiently and cost-effectively delivering the performance design to the chip and the end-product. Flip chip has been identified as a solution and, when combined with a PoP approach, is meeting many of the demands facing the semiconductor market. With that said, the global technical community still faces challenges in implementing flip chip, including fine pitch underfill, brittleness of ultra low-k (ULK) dielectrics and shorting between adjacent bumps. Here, we’ll explore some of these challenges that are currently being considered.

The first challenge relates to underfill, a widely used process in which a liquid material is dispensed to fill the gaps between the flip-chipped die and the associated package substrate. Its primary purpose is to reduce stress in the solder bumps interconnecting the die and the package substrate as a result of differences in coefficients of thermal expansion (CTE) and exposure to a range of temperatures through the lifetime of the package assembly. As the pitch of the flip chip bumps continues to decrease, it simply becomes more difficult to use conventional underfill processes and materials. Reduced bump pitch results in smaller gaps between adjacent flip chip bumps and lower stand-off height between the chip and the package substrate. Both result in increased resistance to the flow of the underfill material itself. This, combined with the trend toward increased chip size, makes it increasingly difficult to ensure void-free, high-throughput underfill. Consequently, the industry is pursuing advanced encapsulation techniques such as capillary underfill, no-flow underfill, vacuum underfill and mold underfill, in addition to continually refining the rheology and various other mechanical and thermal properties of the underfill materials themselves. Although much progress has been made, further development of equipment, materials, and the associated processes is required.

Another challenge relates to the use of ultra low-k dielectrics. As the wafer process node for manufacturing semiconductor devices migrates from micron to submicron to deep submicron levels, the need for thin, low-k insulative layers to separate and isolate adjacent on-chip conductors grows. At the 32nm process node and below, ULK dielectrics provide the required isolation while minimizing the parasitic capacitance to enable the desired switching speed within the semiconductor chip. To achieve the required dielectric constant of these insulating layers, voids are often introduced into the material, increasing its porosity. As air has a dielectric constant of one, introducing air into the dielectric is an effective means to decrease the dielectric constant. However, it can also substantially increase the material’s brittleness, so it becomes critical to minimize stress on this fragile dielectric layer. Several solutions are being considered, including increasing top metal layers’ thickness, increasing passivation layer thickness, and, in most if not all cases, very carefully selecting the underfill material to balance the mechanical properties, such as CTE and Young’s modulus, with those of the ULK dielectric. Also read, "Low-k family introduced by SBA Materials" by Dr. Phil Garrou

A third challenge relates directly back to the flip chip interconnect itself and the requirement to have both fine pitch and sufficient stand-off height (typically, above 60µm) between the chip and the package substrate for underfill. For the past 40 years, balls of solder, either tin/lead or lead-free, have been used as the primary flip chip interconnect. Reductions in bump pitch are pushing the limits of conventional assembly processes, resulting in lower substrate and package assembly yields, reduced manufacturing throughput and higher packaging costs. A common failure relates to electric shorting between adjacent solder bumps. This is due to the spherical nature of each solder mass, which results in roughly equal height and width of the solder mass. One solution is to take a more columnar approach, in which the height-to-width ratio is greater than one.

One approach that is gaining traction uses a copper column or pillar, either directly on the chip itself or on the package substrate. The copper pillar approach provides scalability to very fine pitch: 100µm-pitch area array. The columnar shape allows for taller stand-off height as well as greater gaps between adjacent contacts, eliminating shorting and reducing flow resistance to underfill, allowing for void-free underfill. Using a copper pillar on the package substrate in particular allows for solder, a lower modulus material than copper, to remain at the interface to the bond pad, helping address the ULK dielectric brittleness described earlier. Also watch: "Leveraging 3D packaging technologies: Tessera shares its latest work"

Conclusion

In summary, the demand for electronic products with higher functionality, higher performance, and smaller form factor is unlikely to abate anytime soon. The mobile phone market will continue to lead the charge, pushing the limits of advanced packaging technologies for years to come. With the number of connections to the chip growing, and the allowable package footprint shrinking, flip chip technology is increasingly employed for various processors in mobile handsets. Although conventional flip chip interconnect has proven sufficient for the current generation of devices, new approaches, processes, materials, and structures will need to be developed to address the challenges of the future.

Craig Mitchell is senior vice president of the Interconnect, Components and Materials (ICM) division at Tessera. Mitchell is named as inventor on 32 patents. He received a bachelor’s degree in electrical engineering from Manhattan College, New York City, USA.

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(November 10, 2010) — Alan Huffman, research engineer and program manager at RTI International, presented a paper at IMAPS 2010 titled "On the origins, status, and future of flip-chip and wafer-level packaging." In a podcast interview with Debra Vogler, senior technical editor, Huffman discusses the advantages and disadvantages of flip-chip and wafer-level packaging (WLP), along with potential solutions.

Example of a 3D integrated module (Source: RTI)

Speaking on silicon interposers, Huffman discusses how they enable "a so-called 2.5D integration that many companies see as a stepping stone on the way to true chip-to-chip integration." He also observes that they may be used at the smaller IC nodes to protect fragile low-k dielectrics.

Improved electrical performance, higher interconnect density, and reduction of the package size are benefits of flip-chip packaging. However, main disadvantages include limitations on the die size that can be packaged and still maintain a reliable lifetime performance. Though underfills can help, they raise costs; increasing solder bump sizes will also help, but do so at the expense of lowering the interconnect density. A potential solution is a silicon interposer as a flip-chip mounting substrate. To tackle electromigration, copper pillar bumps are being used to improve electromigration reliability, and are gaining wide acceptance, according to Huffman, who details additional benefits from their use. 

 
Process sequence for fan-out packaging

Fan-out wafer-level packaging (FOWLP) increases the surface area of a device, increasing the number of interconnects and enabling manufacturers to take advantage of die shrinks. STATS ChipPAC has announced high-volume manufacturing for this technology, and Huffman anticipates that other OSATs will follow with their own versions. 

Listen to Alan Huffman’s podcast interview: Download or Play Now

(November 9, 2010)Kulicke & Soffa Industries Inc. (Nasdaq: KLIC) introduced the IConnPS ProCu wire bonder optimized for copper wire bonding. The K&S IConnPS ProCu offers a significant and new level of capability for packaging lines transitioning from gold to copper wire bonding.

This is the latest addition to the Power Series product line, which offers high accuracy over a large bondable area for advanced packaging. It employs a combination of precisely designed new hardware, an optimized gas delivery system, and powerful new process controls to provide the most advanced system available for copper wire bonding. Specialized copper processes, ProCuBond and ProCuSSB, address the many challenges of bonding copper wire while delivering higher productivity. New process tools and features make the complex capabilities easy to use. A new cover gas delivery system enables a wide process window with less gas consumption. High precision gas regulation, metering, and filtering enables production stability.

In addition to wire bonders, K&S has been delivering innovative capillary solutions for fine copper wire bonding. The latest offering is the CuPRA3GTM, which delivers excellent bondability, extended life span, and workability with any copper wire type.

The IConnPS ProCu is currently being qualified with customers. Initial production shipments to customers are anticipated this quarter.

Kulicke & Soffa (NASDAQ: KLIC) designs and manufactures semiconductor and LED assembly equipment. Learn more at www.kns.com

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(November 8, 2010)Advanced Packaging asked our readers where — at the foundry, in a dedicated semiconductor assembly and test services (SATS) house, or on the SMT line — package-on-package (POP) assembly should take place.

The majority vote goes to the packaging house (about 53% of votes), with respondents stating that the testing capability and experience gives SATS providers the edge. SATS companies offer full turnkey solutions providing not only packaging solutions, but also test services on individual units and on stacked packages, said one reader. Another noted that the packaging house provides the lowest-cost solution without impacting SMT assembly time or technology. Chip fab and SMT line both garnered approximately equal votes.

Still another respondant states, "If everything comes from a single chip fab that is equipped for PoP assembly, then the fab is suitable. Commonly, however, PoP is used to mix standard and custom silicon, or silicon from different product lines. In this case, either the package-assembly house or the SMT line may be appropriate, depending on the technologies. The SMT line has advantages if the resolutions and solder technologies are compatible with the line, which is not always the case; sometimes you also want POP to be pre-sealed. This will leave space for a separate packaging-assembly line — though this does not necessarily imply a dedicated packaging-assembly house."

You can still take the survey and let us know what you think, here: http://www.surveymonkey.com/s/packageonpackage

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(November 8, 2010 – BUSINESS WIRE) — Tessera Technologies Inc. (Nasdaq:TSRA) opened a new office in Seoul to support Tessera’s regional activities with OEMs and industry partners in the growing cell phone market.

"The Republic of Korea is experiencing solid growth in the mobile device market," said Woong Lee, director of business development and marketing, Tessera Korea Ltd., adding that Tessera has several important customers and partners in South Korea.

In addition, Tessera held its first Tessera Technology Symposium in Seoul. The Symposium, "Transforming Consumer Electronics with HD Video," featured a keynote presentation from Tae Chan Kim, Master, Samsung LSI and presentations:

  • Transforming Consumer Electronics with HD Video
  • The Camera Sensor: Its Evolution and Value
  • Transforming the Camera
  • MEMS: Next-Generation Auto-Focus for HD Video
  • Creating the User Experience for HD Video Capture and Display

Tessera Technologies, Inc. invests in, licenses and delivers innovative miniaturization technologies that transform next-generation electronic devices. Learn more at www.tessera.com.

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(November 5, 2010 – BUSINESS WIRE) — Dow Electronic Materials, a business unit of The Dow Chemical Company (NYSE: DOW) has broken ground for a new metalorganic precursor manufacturing plant in Cheonan, Korea.

The construction of Dow Electronic Materials’ new Korea plant is part of a multi-phase plan announced in June 2010 to expand TrimethylGallium (TMG) production capacity to meet the surging global demand for the material in the LED and related electronics markets. The facility is expected to be operational in early 2011.

Capacity expansion in the United States at existing facilities is also progressing as planned, with new capacity expected by the end of 2010 and continuing through the first quarter of 2011. Total additional capacity resulting from the multi-phase plan is expected to be 60 metric tons per year.

“Meeting our customers’ near-and long-term needs for high-quality materials continues to be a priority for us,” said Joe Reiser, global business director, Metalorganic Technologies, Dow Electronic Materials. “The construction of our new facility in Korea illustrates our commitment to investing in expansion and having supply capabilities close to our customer base in Asia.”

TMG is a metalorganic chemical vapor deposition (MOCVD) precursor material that is critical to the manufacture of LEDs and other compound semiconductor devices. Exceptionally high-quality materials and precise delivery of metalorganic precursors are essential to building reliable LEDs.

The new metalorganic precursor plant in Korea will be located in Cheonan, approximately 85 kilometers south of Seoul. Dow Electronic Materials currently manufactures TMG and other metalorganic precursors in North Andover, MA, while packaging is done in both North Andover, MA, and Taoyuan, Taiwan.

Dow Electronic Materials supplies precursors to the LED market and has patented precursor manufacturing processes and delivery technology. More information about Dow can be found at www.dow.com.

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(November 4, 2010 – GLOBE NEWSWIRE)LTX-Credence Corporation (Nasdaq:LTXC), a global provider of focused, cost-optimized ATE solutions, introduced the ASLx, a new test system extending the capabilities of the ASL low-cost analog and mixed-signal test platform. ASLx provides four times the analog and digital pin count and five times the power capability of the ASL1000.

These new capabilities are designed to enable the ASLx to address the new demands of the power management market and greatly enhance multi-site test capabilities, while maintaining the cost of test advantage over competitive solutions. The ASLx provides improved digital, time measurement, audio and power performance while maintaining loadboard and test program compatibility with the over 3,500 ASL1000 systems installed worldwide. Volume shipments of ASLx are expected to commence in the first calendar quarter of 2011.

The ASLx has been designed to meet LTXC’s Integrated Multi-System Architecture (IMA) compliance, giving the ASLx the flexibility to be used in a broad range of configurations to meet the unique demands of low pin count applications. This design is intended to allow customers to achieve low cost targets for testing price-sensitive analog and mixed signal devices.

LTX-Credence is a global provider of ATE solutions, addressing test requirements of the wireless, computing, automotive and entertainment market segments. Additional information can be found at www.ltxc.com.

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