Category Archives: MEMS

(September 3, 2010) — Researchers at the Georgia Institute of Technology have developed a new class of electronic logic device in which current is switched by an electric field generated by the application of mechanical strain to zinc oxide nanowires.

The devices, which include transistors and diodes, could be used in nanometer-scale robotics, nano-electromechanical systems (NEMS), micro-electromechanical systems (MEMS) and microfluidic devices.  (Read more about NEMS, MEMS, and microfluidics applications and technologies here.) The mechanical action used to initiate the strain could be as simple as pushing a button, or be created by the flow of a liquid, stretching of muscles or the movement of a robotic component.

In traditional field-effect transistors, an electrical field switches – or "gates" – the flow of electrical current through a semiconductor.  Instead of using an electrical signal, the new logic devices create the switching field by mechanically deforming zinc oxide nanowires.  The deformation creates strain in the nanowires, generating an electric field through the piezoelectric effect – which creates electrical charge in certain crystalline materials when they are subjected to mechanical strain. 

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"When we apply a strain to a nanowire placed across two metal electrodes, we create a field, which is strong enough to serve as the gating voltage," said Zhong Lin Wang, a Regents professor in the Georgia Tech School of Materials Science and Engineering.  "This type of device would allow mechanical action to be interfaced with electronics, and could be the basis for a new form of logic device that uses the piezoelectric potential in place of a gate voltage."

Wang, who has published a series of articles on the devices in such journals as Nano Letters, Advanced Materials and Applied Physics Letters, calls this new class of nanometer-scale device "piezotronics" because they use piezoelectric potential to tune and gate the charge transport process in semiconductors.  The devices rely on the unique properties of zinc oxide nanostructures, which are both semiconducting and piezoelectric.

The transistors and diodes add to the family of nanodevices developed by Wang and his research team, and could be combined into systems in which all components are based on the same zinc oxide material.  The researchers have previously announced development of nanometer-scale generators that produce a voltage by converting mechanical motion from the environment, and nanowire sensors for measuring pH and detecting ultraviolet light.

"The family of devices we have developed can be joined together to create self-powered, autonomous and intelligent nanoscale systems," Wang said. "We can create complex systems totally based on zinc oxide nanowires that have memory, processing, and sensing capabilities powered by electrical energy scavenged from the environment."

A strain-gated transistor is made of a single zinc oxide nanowire with its two ends – the source and drain electrodes – fixed to a polymer substrate by metal contacts.  Flexing the devices reverses their polarity as the strain changes from compressive to tensile on opposite sides. Using strain-gated transistors fabricated on a flexible polymer substrate, the researchers have demonstrated basic logic operations – including NOR, XOR and NAND gates and multiplexer/demultiplexer functions – by simply applying different types of strain to the zinc oxide nanowires.  They have also created an inverter by placing strain-gated transistors on both sides of a flexible substrate. 

The devices operate at low frequencies – the kind created by human interaction and the ambient environment – and would not challenge traditional CMOS transistors for speed in conventional applications.  The devices respond to very small mechanical forces, Wang noted. The Georgia Tech group has also learned to control conductivity in zinc oxide nanodevices using laser emissions that take advantage of the unique photo-excitation properties of the material.  When ultraviolet light from a laser strikes a metal contact attached to a zinc oxide structure, it creates electron-hole pairs which change the height of the Schottky barrier at the zinc oxide-metal contact. These conductivity-changing characteristics of the laser emissions can be used in tandem with alterations in mechanical strain to provide more precise control over the conducting capabilities of a device. "The laser improves the conductivity of the structure," Wang noted.  "The laser effect is in contrast to the piezoelectric effect.  The laser effect reduces the barrier height, while the piezoelectric effect increases the barrier height."

The research group has also created hybrid logic devices that use zinc oxide nanowires to control current moving through single-walled carbon nanotubes.  The nanotubes, which were produced by researchers at Duke University, can be either p-type or n-type.

The research has been supported by the National Science Foundation (NSF), the Defense Advanced Research Projects Agency (DARPA), and the U.S. Department of Energy (DOE).  In addition to Wang, the research team
includes Wenzhuo Wu, Yaguang Wei, Youfan Hu, Weihua Liu, Minbaek Lee, Yan Zhang, Yanling Chang, Shu Xiang, Lei Ding, Jie Liu and Robert Snyder.

(September 1, 2010) — At the Engineering in Medicine and Biology Conference (EMBC), imec and its project partners launched the European Seventh Framework Project MIRACLE. The MIRACLE project aims to develop an operational lab-on-chip for the isolation and detection of circulating and disseminated tumor cells (CTCs and DTCs) in blood. The new lab-on-chip is an essential step towards faster and cost-efficient diagnosis of cancer. Imec has also worked on the MASCOT lab-on-chip project to detect breast cancer.

Detection of circulating and disseminated tumor cells in blood is a promising methodology to diagnose cancer dissemination or to follow up cancer patients during therapy. Today, the detection analyses of these cells are performed in medical laboratories requiring labor-intensive, expensive, and time-consuming sample processing and cell isolation steps. A full tumor cell detection analysis can take more than a day. A lab-on-chip, integrating the many processing steps, would enable faster, easy-to-use, cost-effective detection of tumor cells in blood. They are minimally invasive, increasing the patient’s comfort and the efficiency of today’s healthcare.

In a preceding joint project by some of the partners (MASCOT FP6-027652), individual microfluidic modules for cell isolation, cell counting, DNA amplification and detection have been developed. Based on this expertise and strengthened by additional partners, the development of a fully automated lab-on-chip platform to isolate, count, and genotype CTCs is envisaged within the framework of the MIRACLE project. For genotyping, genetic material (i.e. the mRNA) will be extracted from the cells and multiple cancer-related markers will be amplified based on multiplex ligation dependent probe amplification (MLPA) followed by their detection using an array of electrochemical sensors. Full integration of all steps requires innovative research and processing steps that need a combination of the multidisciplinary and unique expertise of the different project partners (ranging from microfluidics to interfacing, miniaturization, and integration skills). The resulting lab-on-chip tumor detection system will be well ahead of the current state-of-the-art, revolutionizing cancer diagnostics and individualized theranostics.

Within the MIRACLE project framework, imec, as project coordinator, collaborates with the Universitat Rovira I Virgili (Spain), the Institut für Mikrotechnik Mainz, AdnaGen, ThinXXs and Consultech (Germany), MRC Holland (The Netherlands), the Oslo University Hospital (Norway), the KTH Royal Institute of Technology, Multi-D and Fujirebio Diagnostics (Sweden), ECCO – the European CanCer Organization and ICsense (Belgium) and Labman (UK). The project aims at developing a fully automated and integrated microsystem providing the genotype (gene expression profile) of CTCs and DTCs starting from clinical samples. MIRACLE is partly funded by the European Commission (FP7-ICT-2009.3.9). More information on the project is available at www.miracle-fp7.eu

Imec performs world-leading research in nanoelectronics. Further information on imec can be found at www.imec.be.

Other cancer research in the nano sector: 
Nanopharmaceutical cancer therapy trial data presented by Cerulean Pharma

Nano in biology: research for improved drug delivery, nanomaterial handling

Visit the Life Sciences and Medical Nano center on ElectroIQ.com

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September 1, 2010 – Radio frequency (RF) MEMS technology is poised for a bit surge in 2010-2011, just in time to maybe help Apple solve a vexing problem with its iPhone.

Reported problems with Apple’s iPhone 4 reception, blamed on a bad antenna/design, caught a lot of attention this summer (which Apple denies but sells a hardware "bumper" to fix). Several technologies could fix antenna issues, e.g. silicon-on-sapphire field-effect transistors (FET) and barium/strontium/titanate (BST) varactors, notes Jérémie Bouchaud, principal analyst for MEMS and sensors at iSuppli — but RF MEMS technology including switchers and varactors perform better in terms of insertion loss. They also can be used for impedance matching of the power amplifier.

Global RF MEMS forecast. (Source: iSuppli)

Held back in recent years by what Bouchaud calls "myriad commercialization and technological obstacles," sales of RF MEMS are expected to double in 2010 to $8.1B, after staying in the $3B-$4B range for several years — and increase by 2×-3× in each of the next three years, topping $223B by 2014, he projects. By then more than half of all cell phones will ship with some form of front-end module tuning using RF MEMS technology.

Who’s positioning themselves to ride this RF MEMS wave?

Cell phones. Mobile handset makers like how RF MEMS can be used for front-end tuning to improve antenna performance, spurred by new wireless standards such as LTE for 4G technology. Players: WiSpry, TDK-Epcos.

Testing and instrumentation. Applications such as ATE and RF test offer opportunities for RF MEMS switches and varactors — e.g. wireless infrastructure (e.g. femto cells) and cellular base stations, offering a cheaper and higher-performing alternative to current switches. Players: Analog Devices, Radiant Technologies, XCOM Wireless (with relay maker Teledyne), Omron.

Defense/aerospace applications. These applications include radio systems and phased array antennas, generally looking ahead to 2014 and beyond, but representing a million-units market. Players: Startups Radant MEMS, MEMtronics.

For more information, check iSuppli’s full report: "RF MEMS switches and varactors deliver on their promise."

(September 1, 2010) — Plasma-Therm LLC, supplier of plasma etch and deposition process equipment, delivered a VERSALINE RIE etch system to a leading manufacturer of high-technology defense systems from the EMEA region.

This international manufacturer designs, develops and produces high technology defense systems for aerospace, naval, and land-based applications. The VERSALINE etch system, which complements other Plasma-Therm process equipment at this facility, was selected for its proven reliability and reproducibility during the fabrication of devices for mission critical components. Low maintenance and process flexibility makes the VERSALINE RIE ideally suited for multiple device fabrication steps and provides the defense industry with a valuable asset for R&D and production. 

The system is configured to enhance processing technology with features including EndpointWorks integrated with the system’s control software to output real-time in situ process data and reproducibility.

“The VERSALINE platform has the ability to support a number of different technologies,” states Dr. David Lishan, director of technical marketing at Plasma-Therm.

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Plasma-Therm LLC is a U.S. based supplier of advanced plasma process equipment that serves various specialty markets including MEMS, photomask, solid state lighting, thin film head and compound semiconductor. For more information, visit www.PlasmaTherm.com

(August 27, 2010 – BUSINESS WIRE) — Analog Devices Inc. (NYSE: ADI) announced that ZOLL Medical Corporation (Nasdaq GS: ZOLL) selected ADI’s high-performance iMEMS technology to enable its palm-sized CPR (cardiopulmonary resuscitation) device. The MEMS-enabled device measures the rate and depth of chest compressions administered by rescuers. The PocketCPR device uses an ADI digital iMEMS accelerometer to convert the motion of PocketCPR into real-time measurement data to accurately read the rate and depth of CPR chest compressions. This helps rescuers achieve the right amount of force and frequency of chest compressions recommended by the American Heart Association (AHA).

PocketCPR uses Analog Devices’ ADXL322 iMEMS low g high-performance accelerometer with signal-conditioned voltage outputs. Operating on power supplies as low as 2.7 VDC, the accelerometer typically consumes only 340 micro amps, and can be power-cycled for even greater battery life. The typical noise floor is less than 220 micro g per root hertz, allowing small tilt changes to be sensed using the narrow bandwidths (<10 Hz) typical of human motion. Selectable bandwidths of 0.5 Hz to 2.5 kHz allow additional flexibility to suit the application. Other products in ADI’s digital iMEMS accelerometer portfolio include the ADXL345, ADXL327, and ADXL325.

PocketCPR coaches a rescuer with audio and visual instructions to initiate the critical rescue steps needed for reviving someone experiencing sudden cardiac arrest. These steps include checking responsiveness, calling for help, and performing CPR. All steps follow the AHA Chain of Survival.

“By working with engineers at Analog Devices, we were able to turn our vision of developing a small, affordable CPR rescue device into reality,” says Mark Totman, president of Bio-Detek, Inc., a wholly owned subsidiary of ZOLL that developed and manufactures the PocketCPR. “Many people are reluctant to perform CPR because they do not have CPR training or lack the confidence to perform CPR. PocketCPR gives them the assurance they need to perform CPR in an emergency,” continued Totman.

Approved by the FDA (U.S. Food and Drug Administration) as an over-the-counter rescue device and affordably priced, PocketCPR provides the user with prompts to encourage a compression depth of 1.5 to 2 inches as recommended by the AHA and International Liaison Committee on Resuscitation (ILCOR). The device instructs the rescuer to “push harder” if the compressions are less than 1.5 inches. If good compressions are delivered, PocketCPR will respond with “good compressions.” A metronome helps the user achieve the proper rate of compression. For more information on PocketCPR, visit http://www.pocketcpr.com.

“According to the Sudden Cardiac Arrest Association, more than 300,000 people in the United States suffer from sudden cardiac arrest each year,” said Patrick O’Doherty, vice president, Healthcare Group, Analog Devices. “The American Heart Association estimates that for each minute that goes by without the heart being restored to a normal rhythm, the survival rate of an individual experiencing sudden cardiac arrest drops by up to 10 percent. PocketCPR helps save lives by ensuring rescuers administer CPR of how ADI’s products and technologies are enabling revolutionary healthcare designs and shaping future advances in medical equipment.”

ZOLL Medical Corporation develops and markets medical devices and software solutions that help advance emergency care and save lives, while increasing clinical and operational efficiencies.

Read the ADI/PocketCPR case study here.

Analog Devices offers healthcare customers a comprehensive portfolio of linear, mixed-signal, MEMS and digital signal processing technologies for medical imaging, patient monitoring, medical instrumentation, and consumer/home healthcare. More information can be found at www.analog.com/healthcare.

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(August 25, 2010 – BUSINESS WIRE) — PhyloTech Inc.’s PhyloChip technology was used in analysis of oil-degrading bacteria during the BP oil spill from the Deepwater Horizon. A peer-reviewed article on the work will be published in the journal Science, titled “Deep-sea oil plume enriches indigenous oil-degrading bacteria.”

The publication reports on water samples collected almost a mile deep off the Gulf of Mexico shore between May 25 and June 2, 2010 during the catastrophic BP oil spill from the Deepwater Horizon drill. PhyloChip analysis of bacterial DNA rapidly revealed distinct differences between plume samples with parts per billion levels of dispersed oil and non-plume samples. In plume samples, 952 distinct bacterial taxa in 62 phyla were detected, a 40% decline in bacterial richness compared to the non-plume samples. The PhyloChip technology identified 16 distinct taxa that were significantly enriched in the plume samples, all classified as γ-Proteobacteria. Nearly all of the bacteria enriched in the plume are either known to degrade hydrocarbons or have been observed in previous investigations to thrive in the presence of crude oil in cold waters. According to the authors, the presence of hydrocarbon-degrading microbial communities implies “a potential for intrinsic bioremediation of oil contaminants in the deep-sea.”

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“Microbial communities are sentinels of environmental and human health,” said Thane Kreiner, Ph.D., Founder, President, and CEO of PhyloTech Inc. “This Science paper demonstrates how our PhyloChip technology can help assess environmental damages and monitor restoration status.”

Also read: Nano, bio converge to provide key nanotech link and visit the Microfluidics section of our MEMS page

Watch a video about the use of PhyloChip analysis in the Deepwater Horizon spill here: http://www.youtube.com/watch?v=BbvV26A9eJg&feature=player_embedded

PhyloTech provides analysis of over 50,000 bacterial and archaeal taxa in samples from any source to solve problems in human health, environmental damages assessment, bioremediation, recreational water quality, drinking water and food safety, and a variety of other applications. PhyloTech was founded in June 2009 based on proprietary PhyloChip and related technology invented in Dr. Gary Andersen’s lab at the Lawrence Berkeley National Laboratory. PhyloTech commenced commercial operations in July 2010. For further information, visit www.phylotech.com

(August 23, 2010 – BUSINESS WIRE) — Sensonor Technologies will present a paper on a gyroscope with north-seeking capability at Symposium Gyro Technology, September 21, 2010. Sensonor Technologies is developing SAR500, a novel high-precision, low-noise, high-stability, calibrated and compensated digital oscillatory gyroscope with SPI interface housed in a custom-made ceramic package.

The SAR500 contains a Butterfly MEMS die and an analog ASIC, housed in a rigid custom-made ceramic package. An FPGA or a digital ASIC contains the needed control and functional algorithms to achieve the superior performance. The gyroscope device is factory-calibrated and compensated for temperature effects to provide high-accuracy digital output over a broad temperature range. Tuning of the excitation and detection frequencies, as well as mechanical and electrical balancing of the dual masses result in very low sensitivity to shock and vibrations.

The sensing element consists of two identical masses suspended by asymmetric springs to pedestals designed to minimize the mechanical and thermal stress. Feedback loops are used to control both the excitation and detection modes. Additional pairs of electrodes are used to tune the resonance frequency of the excitation and detection modes, and to actively compensate the quadrature offset of the gyroscope. By utilizing a unique sealed cavity technology, the vibrating masses are contained within the low-pressure hermetic environment needed for low damping and high Q factors. Further on, improved stability of the gyroscope is achieved by the choice of crystalline materials in the entire structure of the sensing element and of full design symmetry about the vertical axis.

The signal processing circuits consist of a full custom analog ASIC and a digital part which can be implemented in an FPGA or structured ASIC. The analog ASIC includes precision low noise charge amplifiers and 5th order delta-sigma ADCs, as well as voltage references and low pass filters for the feedback signals. The digital ASIC provides a stable, high-resolution implementation of the loop filters and delta-sigma DACs for excitation and detection feedback. It also performs low noise synchronous demodulation, and compensates for temperature drift of bias and scale factor. The gyro is configured as an SPI slave for efficient readout of angular rate as well as other data.

The gyro is designed to achieve an angular random walk of 0.004deg/sqr(hr), in-run bias stability of 0.02deg/hr and bias repeatability of 0.1deg/hr.

Sensonor provides high precision MEMS technology; designing and manufacturing advanced, integrated gyro and pressure sensors for harsh environments. Learn more at www.sensonor.com

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(August 19, 2010) — 16 papers with imec authors were accepted for IEEE International Electron Devices Meeting (IEDM), December 6-8, 2010, in San Francisco. Both ITRS-related as well as More-than-Moore-related research papers have been accepted, rewarding imec’s multidisciplinary R&D platform (featuring two state-of-the-art R&D fabs).

With 11 papers on ITRS scaling topics, imec will discuss a significant contribution to the fundamental understanding on the switching behavior and operation in advanced memory concepts (i.e. resistive RAM (RRAM) devices), among other topics. This has been achieved by applying imec’s longstanding expertise in logic MOS and high-k/metal gate reliability. It demonstrates the power of leveraging expertise from various domains in a flexible manner.

A 2nd highlight demonstrates imec’s continued progress on 3D-through-silicon via (TSV) technology, which is at the forefront of new and enabling ITRS technologies. The paper reports important characterization data of a two-die stacked device combining TSV with high-k/metal gate devices.

In addition, 5 More-than-Moore related topics will be presented at IEDM, covering GaN technology, Si high-voltage devices and MEMS technologies. One particular result is the realization of a high performance MEMS device together with one of our industrial core partners. Imec’s MEMS R&D expertise was applied to provide an industry-relevant solution.

Imec is committed to continue to lead in R&D of 300mm ITRS process technologies, but is also expanding its value offering in More-than-Moore leveraging its 200mm platform. Learn more at www.imec.be.

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(August 18, 2010) — Multitest, MEMS test and calibration equipment provider, sees great opportunities for the MEMS industry in Asia. Alex Chen, Taiwan regional manager, recently became a member of the Semi Taiwan MEMS Committee to actively contribute to the success of the Asian MEMS industry.

The Semi Taiwan MEMS Committee is dedicated to accommodating the special needs of the MEMS industry in Taiwan and influences over all of Asia. The committee is chaired by Dr. Min-Shyong Lin, APM, and consists of members from MEMS manufacturing companies, as well as from the MEMS equipment vendors. (Read more about MEMS manufacturing companies in the 2010 Top 20 MEMS foundry ranks.) The Semi Taiwan MEMS Committee is a sub-committee of the official IC industry committee, and provides suggestions on behalf of the MEMS industry. 

The mission of the MEMS committee is to help solve common industry issues, and excel its business and networking opportunities throughout the supply chain. During the last committee meeting, Mr. Alex Chen gave a presentation about the “Future Challenges of MEMS test and calibration.”

The presentation is available for viewing and/or downloading at www.multitest.com/MEMS-future.

For more information about MT MEMS, visit www.multitest.com/MEMS.

Also read:

DRIE from MEMS to wafer-level packaging by Leslie M. Lea and Carolyn Short.

 Integrated packaging and testing of optical MEMS by Jason M. Eichenhol

IAT students get training on nanotechnology in Taiwan

Top 20 MEMS foundry ranks

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August 16, 2010 – SEMI has reorged into three groups to align its focus areas into IC manufacturing, solar photovoltaic (PV), and related/tangential markets including MEMS and LEDs. All three groups will be charged with developing and delivering member services, globally, through SEMI’s regional offices throughout North America, Europe, and Asia.

The organization’s semiconductor IC business unit will be led by Jonathan Davis, formerly president of SEMI Americas, who will have global profit/loss responsibility for all SEMICON expos, market research, and statistics programs, as well SEMI’s standards efforts. Karen Savala, formerly VP of member services, will take the helm at SEMI Americas, including public advocacy efforts.

Dan Martin will continue to lead SEMI’s PV Group, which is being recognized as a dedicated SEMI business unit. Bettina Weiss, senior director of the PV Group, is promoted to executive director with additional global responsibilities.

Directing SEMI’s activities within its "emerging and adjacent markets" unit is Tom Morrow — which he will take on in addition to his role as SEMI’s chief marketing officer and VP of global expositions.

Each of these groups have process technologies in common and a need for supply chain collaboration, explained Stanley Myers, president and CEO of SEMI, in a statement. But splitting them up will help make SEMI more responsive and offer specialized attention. "These changes are intended to more effectively and efficiently address the increasing complexity and diversity of member needs serving the IC, PV, LED, MEMS, and other markets," he stated.