Category Archives: Vacuum

The Facilities 450mm Consortium (F450C), a partnership of nanoelectronics facility companies guiding the effort to design and build the next-generation 450mm computer chip fabrication facilities, today announced Busch Vacuum Pumps and Systems as the eleventh member company to join the consortium. Busch Vacuum Pumps and Systems brings over 40 years of experience in the semiconductor manufacturing industry with particular focus on energy efficient, harsh-duty vacuums pumps.

“Busch’s expertise in vacuum pumps will be a great asset to the consortium as we discuss solutions for 450mm equipment transition,” said Adrian Maynes, F450C program director.

Busch Vacuum Pumps and Systems is one of the largest manufacturers of vacuum pumps in the world today, which includes a product portfolio specifically for semiconductor and related applications. Vacuum systems are a necessary component to the semiconductor manufacturing process as they remove byproduct materials following the implantation, deposition or etch processes. Busch’s next-generation vacuum pumps offer higher capacity with reduced utilities and limited downtime to support the unique demands of 450mm process platforms.

“The F450C is comprised of the top leaders in our industry, so we are honored to bring our proficiency in vacuum systems to the table,” said Charles Kane, president of Busch USA. “We have had our 450mm roadmap in place for some time, and we can now share our plans with the group to help further its 450mm vision and mission.”

The F450C is a partnership at SUNY’s College of Nanoscale Science and Engineering (CNSE) that is leading the global effort to design and build next-generation 450mm computer chip fabrication facilities. The collaboration includes 11 of the world’s leading nanoelectronics facility companies, including Air Liquide, Busch Vacuum Pumps and Systems, CH2M HILL, CS Clean Systems, Ceres Technologies, Edwards, Haws Corporation, Mega Fluid Systems, M+W Group, Ovivo, and Swagelok. Members of F450C are working closely with the Global 450mm Consortium (G450C), to identify viable solutions required for 450mm high-volume facility construction, with initial focus areas to include reducing tool installation cost and duration and improving facility sustainability.