Metrology

METROLOGY ARTICLES



Semiconductor metrology beyond 22nm: Defect inspection and review

02/23/2012 

As semis are manufactured at the 2X and 1Xnm nodes, new metrology technologies must evolve to fill the gaps. In Part 3 of this 3-part metrology series, SEMATECH discusses the inspection/metrology options for advanced semiconductors.

450mm wafers at SEMI ISS Europe

02/23/2012 

SEMI’s International Strategy Symposium (ISS) meets for its Europe session February 26-28 in Munich, Germany. Following are some of the 450mm wafer presentations scheduled to take place.

IRPS set for April in Anaheim

02/21/2012 

The IEEE International Reliability Physics Symposium (IRPS) is set for April 15, 2012 – April 19, 2012, in Anaheim, CA.

Semiconductor metrology beyond 22nm: 3D memory metrology

02/16/2012 

The 22nm node marks the beginning of a major transition from conventional scaling of planar memory devices to complex 3D architectures. SEMATECH authors examine the metrology needs of 3D memory device architectures in Part 2 of this three-part series.

49 semiconductor wafer fabs close 2009-2011

02/15/2012 

IC manufacturers closed 49 wafer fabs between 2009 and 2011, according to IC Insights. Smaller wafer fabs (?200mm) suffered the most closures, and Japan and North America led the way.

ISMI convenes 200mm semiconductor fab tool obsolescence forum

02/15/2012 

Tool obsolescence is increasingly important to semiconductor manufacturers running 200mm wafer fab lines, reports ISMI, which has chartered an Equipment Obsolescence Forum for alternative sourcing.

Techcet reveals CMP metrology, supply, and process trends

02/14/2012 

Lita Shon-Roy and Michael Fury, PhD, Techcet will present "CMP Market Outlook & New Technology - Dynamic Slurry Metrology," a free webinar at 2 times on February 22.

New RAVE division offers semiconductor makers custom lithography defect study

02/13/2012 

RAVE N.P. Inc. established a new division, Advanced Technical Instruments or ATI, comprising SEM, AFM, and other analysis tools, as well as custom semiconductor and photomask services such as haze generation systems.

Tektronix donates oscilloscopes, other semiconductor metrology equipment to WSU Vancouver

02/13/2012 

Tektronix donated semiconductor test and measurement equipment to Washington State University Vancouver: arbitrary/function generations, a real-time spectrum analyzer, digital phosphor and mixed signal oscilloscopes, Keithley's semiconductor parameter analyzers, and Fluke's True-rms multimeters.

Semiconductor yield at 450mm: Solid State Technology March 2012 issue preview

02/10/2012 

The March 2012 issue of Solid State Technology will feature "450mm wafer transition" from Dr. Brian Trafas, chief marketing officer at KLA-Tencor. The following is a sneak preview of Dr. Trafas' article.

Semiconductor metrology beyond 22nm: FinFET metrology

02/09/2012 

SEMATECH authors discuss semiconductor metrology solutions currently being investigated to address the challenges of future nodes. FinFETs raise new metrology complexities, as the entire 3D structure becomes critical for process control, including fin and gate dimensions, profiles and roughness, and metal gate undercuts.

Theta Delta's burn-in & long-term semiconductor testers gain Core Wafer Systems technologies

02/09/2012 

Theta Delta will incorporate Core Wafer Systems technologies into its burn-in test and long-term reliability test systems for semiconductors. Core Wafer Systems provides parallel measurement schema for semiconductor test.

2011 ITRS: DRAM, 3D Flash, MEMS, nano scaling steal the show

02/08/2012 

The 2011 International Technology Roadmap for Semiconductors (ITRS) has been publicly released. Several areas of advancement are highlighted in the 2011 ITRS: DRAM and Flash memory, and MEMS.

Semiconductors to use most ultrapure water in 2012

02/07/2012 

The electronics industry will edge out coal-fired boilers as the biggest purchaser of ultrapure water systems and consumables in 2012, according to the McIlvaine report: Ultrapure Water World Markets.

Silicon wafer revenues increased, shipments tapered in 2011

02/07/2012 

Worldwide silicon wafer revenues improved 2% YOY, shows the SEMI Silicon Manufacturers Group. Worldwide silicon wafer area shipments, however, decreased 3%, indicating a loss of momentum in H2 2011, said Kazuyo Heinink, SEMI SMG.

Rudolph sells metrology tool for back-end wafer packaging processes

02/06/2012 

Rudolph Technologies (NASDAQ:RTEC) delivered the first MetaPULSE metrology system to measure under bump metallization (UBM) and redistribution layers (RDL) in advanced package manufacturing.

Semiconductor industry revenue targets $323.2B in 2012

01/31/2012 

The global semiconductor market will see a slow 2012, reports IHS, with economic uncertainty and semiconductor inventory not moving enough to stimulate new production. Expect negative growth in Q1 2012, a nascent rebound in Q2, and strong growth in Q3 2012, IHS reports.

TI closes semiconductor fabs in TX and Japan

01/27/2012 

Texas Instruments (TI, NASDAQ:TXN) will close 2 older semiconductor manufacturing facilities in Hiji, Japan and Houston, TX over the course of the next 18 months. Production from these analog chip sites will be moved to more advanced TI facilities.

President Obama's Intel visit: Fab 42 update, American manufacturing themes

01/27/2012 

President Barack Obama visited the Intel Ocotillo campus in Chandler, AZ. The President spoke about Intel's technological innovation, and manufacturing jobs in America.

SEM tweak enables crystal study of particles as small as 10nm

01/26/2012 

NIST materials scientists modified a standard SEM for a roughly 10-fold improvement in measuring the crystal structure of nanoparticles and extremely thin films. It enables crystal structure study of particles as small as 10nm.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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