Semiconductors

SEMICONDUCTORS ARTICLES



IMEC adds double-patterning to 193nm immersion, EUV litho efforts

07/12/2006  July 12, 2006 - European research consortium IMEC has extended its research program for 193nm immersion lithography to include double-patterning techniques to address needs of leading-edge process technologies, particularly for flash memory devices. The program now runs parallel to IMEC's other lithography efforts targeting hyper-NA immersion and extreme-ultraviolet lithography (EUV).

SEMI hikes 2006 equipment forecast, but 2007 now seen flat

07/11/2006  July 11, 2006 - Semiconductor growth has been very strong in 2006 so far, with "tremendous" demand for tools, particularly in North America, according to SEMI's Stanley Myers, discussing the group's midyear outlook for semiconductor equipment and materials during a lunch panel presentation during the first day of SEMICON West on Monday, July 10.

ASMI, CEA-Leti target epi R&D for sub-45nm nodes

07/11/2006  July 11, 2006 - ASM America, a subsidiary of ASM International NV, and CEA-Leti are forming a joint development research program (JDP) to develop sub-45nm epitaxy and epitaxy pre-clean technologies, with the goal of finding alternative processing schemes for new front-end-of-line CMOS processing technologies.

EDA Integration Enhances Analysis

07/11/2006  Ansoft Corporation announced that their circuit-simulation software for high-performance IC design — Nexxim — was accepted into the Cadence Design Systems, Inc., Connections Program. Cadence's Virtuoso Analog Design Environment already integrates other Ansoft software, including their Q3-D Extractor and TPA package analysis tools.

Nikon, ASML ready for "last" battle with 193nm high-NA water immersion tools

07/11/2006  In what should be the last roundup of water-based 193nm immersion lithography systems, two of the big lithography tool vendors are coming out with their latest tools targeting 45nm (logic) and 32nm (memory) semiconductor manufacturing. Nikon's NSR-S610C ArF immersion scanner (1.30NA) is scheduled for deliveries by year's end, while ASML's Twinscan XT:1900i with 1.35NA optics, is being prepped for deliveries sometime in mid-2007.

Memory splurges boost 2006 capex forecast, but 2007 outlook suddenly cloudy

07/11/2006  An infusion of new fresh investments from chipmakers, particularly memory firms, has caused Gartner Inc. to hike its outlook for capital spending in 2006 -- but better growth this year will come at a steep price for the near future of the equipment industry.

Building on its decade of leadership in China, Toppan Photomasks expands Shanghai site

07/11/2006  July 10, 2006 -- /BUSINESS WIRE/ -- ROUND ROCK, Texas -- Toppan Photomasks, Inc. today announced plans to expand its Shanghai facility, adding capacity to produce photomasks used to manufacture semiconductor devices with 180nm design rules, and additional lithography and inspection capacity for 250nm-and-above products.

Freescale leaps ahead in MRAM race

07/11/2006  Freescale Semiconductor has broken away from the pack in the race to commercialize magnetoresistive random access memory, or MRAM. The Austin, Texas-based company announced on Monday that it is in volume production of the world's first commercially available MRAM chip. The chip is intended to combine at least three qualities that previously had been unavailable together.

Tessera introduces wafer-level technology for optical components

07/11/2006  Tessera Technologies Inc., a provider of miniaturization technologies for the electronics industry, unveiled Shellcase CF, a wafer-level technology for optical components integrated into electronic products such as miniaturized cameras in camera phones, digital still cameras and video camcorders.

Dow corning, Rohm and Haas pair for sub-65nm litho coatings

07/10/2006  July 10, 2006 - Rohm and Haas Electronic Materials Microelectronic Technologies and Dow Corning Corp. have renewed a joint development agreement to work on novel spin-on silicon hardmask antireflective coatings for sub-65nm lithography in flash, DRAM, and logic IC devices.

OnWafer extends plasma process control offerings with AE unit deal

07/10/2006  July 10, 2006 - OnWafer Technologies, Pleasanton, CA, has acquired the plasma management division of Advanced Energy Industries Inc., including IP and technology-related assets, in a move to extend its position in plasma process control and diagnostics wireless metrology technology. Terms of the deal were not disclosed.

Vacuum automation firm nabs funding from Intel, VCs

07/10/2006  July 10, 2006 - BlueShift Technologies Inc., a manufacturer of a wafer-processing platform utilizing vacuum and automation technologies founded by former Brooks Automation execs, has secured a Series B round of financing totaling $12 million, to accelerate product launch activities and fuel expansion into international markets.

Freescale touts volume output of MRAM devices

07/10/2006  July 11, 2006 - Freescale Semiconductor says it has ramped to volume production of its 4Mbit, 0.18µm-based magnetoresistive random access memory (MRAM) devices.

Air Liquide's Balazs Analytical Services announces three new tests for speciation of total oxidizable carbon in ultrapure water

07/10/2006  July 7, 2006 -- Fremont, Calif. -- Balazs Analytical Services, a division of Air Liquide Electronics U.S. LP, announces three new tests for Total Oxidizable Carbon (TOC) speciation in ultrapure water (UPW).

Olympus system inspects wafer top, back, edge and bevel

07/10/2006  July 7, 2006 -- /BUSINESS WIRE/ -- SAN JOSE, Calif. -- Olympus Integrated Technologies America (Olympus-ITA), a subsidiary of Olympus Corporation of Japan, introduces the Model AL3300 optical inspection and defect review system for full top, edge, bevel and back side inspection of 300 millimeter wafers.

Applied Materials delivers key technology for 45nm contacts with Endura iLB II System

07/10/2006  July 10, 2006 -- /BUSINESS WIRE/ -- SANTA CLARA, Calif. -- Applied Materials, Inc. today announced its Applied Endura(R) iLB(TM) II (integrated liner/barrier) system, which combines major advances in PVD(1) titanium (Ti) and preclean technologies to reduce resistance in critical contact structures by up to 40%.

Entegris launches new immersion lithography innovation

07/10/2006  July 6, 2006 -- /BUSINESS WIRE/ -- CHASKA, Minn. -- Entegris, Inc. (Nasdaq:ENTG) announced today that it will introduce its LiquidLens(TM) UPW (ultrapure water) purification system next week at the semiconductor global trade show SEMICON West 2006 in San Francisco.

Micralyne Expands with SUSS

07/10/2006  Micralyne, a MEMS components manufacturer, announced it has purchased SB6e wafer bonder and BA6 aligner systems from SUSS MicroTec, Inc.




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Environment, Safety & Health

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The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

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As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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