Wafer Processing

WAFER PROCESSING ARTICLES



Wafer-scale graphene grown at lower temp with Cu film

03/19/2012 

University of Texas at Austin researchers demonstrated high-quality, wafer-scale graphene deposition on evaporated copper films, using an AIXTRON cold-wall vertical BM (Black Magic) Pro reactor.

SUSS combines resist coat and develop platforms

03/19/2012 

SUSS MicroTec launched the RCD8 manual resist coat and develop platform for R&D and low-volume use in MEMS, semiconductor packaging, LEDs, and other applications.

CVD Equipment doubles manufacturing space with new NY facility

03/19/2012 

CVD Equipment Corporation (Nasdaq:CVV) purchased a new facility in Central Islip, NY, doubling the space for its CVD and gas control equipment assembly, and unifying its nano-materials lab.

AIXTRON opens MOCVD training center in China

03/16/2012 

AIXTRON's training and demonstration center in Suzhou, China, will focus on improving MOCVD in advanced semiconductor and LED manufacturing operations around China, as well as on employee and environmental safety in electronics production environments.

TEL silicon carbide (SiC) epitaxy tool ordered by Infineon

03/16/2012 

Infineon Technologies ordered the Probus-SiC epitaxy film growth tool from TEL for mass production of advanced SiC power devices.

TEL acquires advanced packaging tool supplier NEXX

03/16/2012 

TEL will acquire semiconductor packaging equipment supplier NEXX Systems. NEXX makes advanced deposition equipment, including ECD and PVD tools, for wafer-level packaging (WLP).

AMAT loses top spot in VLSIresearch semiconductor equipment supplier rankings

03/16/2012 

VLSIresearch released its 2011 Top Semiconductor Equipment suppliers rankings, noting important acquisitions and strong spending in lithography tools in 2011. Semiconductor equipment spending was driven by aggressive capacity expansion in the foundry and logic sectors.

Samsung, IBM and GlobalFoundries look to the future: A report from the Common Platform Technology Forum

03/15/2012 

Execs from Samsung, IBM, GlobalFoundries and ARM looked to the future at The Common Technology Platform Forum in Santa Clara. They focused on the innovation pipeline for 20nm and 14nm technology nodes, and the role that EUV, FinFETs, TSVs, CNTs and DSA will play.

SAFC Hitech expands LED precursor production in Taiwan

03/15/2012 

SAFC Hitech opened a multi-million dollar 270000sq.ft. expansion at its facility in Kaohsiung, Taiwan, increasing capacity for high-quality LED precursor production.

MATHESON incorporates RFID, pressure monitoring in compressed gas control system

03/14/2012 

MATHESON debuted the Lasso System, a customer-centric supply chain and inventory management system that can monitor the location and operating status of gas products and other assets in the REAL-Time Gas and Asset Management System.

Silicon wafers sliced to 10% conventional bulk with Hyperion 3

03/14/2012 

Twin Creeks Technologies, semiconductor and solar cell manufacturing equipment supplier, debuted its first commercial silicon wafer production system that reduces solar module and semiconductor device wafers by up to 90%.

imec studies molecular beam epitaxy for advanced CMOS on high-mobility compound semiconductors

03/13/2012 

Riber, MBE tool supplier will work with imec on epitaxy process technologies for next-generation III-V semiconductor CMOS devices.

RASIRC wet thermal oxidation cuts oxide film fab time

03/13/2012 

RASIRC determined that a new wet thermal oxidation process on a RASIRC Steamer enables 87% better wafer throughput than dry oxidation of uniform thin oxides.

Semiconductor manufacturing equipment sales rose 9% in 2011

03/13/2012 

Worldwide sales of semiconductor manufacturing equipment totaled $43.53 billion in 2011, representing a year-over-year increase of 9%, shows SEMI. North America surpassed Taiwan as the region with the highest amount of spending.

2012 semiconductor spending forecast nearly doubled at Gartner

03/13/2012 

Worldwide semiconductor revenue is projected to total $316 billion in 2012, a 4% increase from 2011, according to Gartner Inc. This outlook is up from Gartner's previous forecast, made in Q4 2011, for 2.2% growth.

GLOBALFOUNDRIES CEO joins Global Semiconductor Alliance board

03/12/2012 

The Global Semiconductor Alliance (GSA), global semiconductor industry association, appointed Ajit Manocha, CEO of GLOBALFOUNDRIES, to its board of directors. 

Fraunhofer partners for eco-friendly semiconductor clean chemistries

03/09/2012 

Fraunhofer Center Nanoelectronic Technologies is collaborating with bubbles & beyond to jointly develop novel cleaning solutions for the microelectronics industry, specifically, removing lithographic materials from semiconductor wafers.

Siltronic scales down 150mm silicon wafer production in US and Germany

03/09/2012 

Siltronic, subsidiary of Wacker Chemie AG, will stop producing 150mm silicon wafers at its Portland, OR, facility in Fall 2012, and will consolidate 150mm production at its Burghausen, Germany, site.

SINGULUS sells vacuum deposition tools to semiconductor sector

03/07/2012 

Singulus Technologies Aktiengesellschaft (SINGULUS) received 2 orders for its TIMARIS vacuum deposition system from the semiconductor industry.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

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Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

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