Wafer Processing

WAFER PROCESSING ARTICLES



UNISEM records 40% jump in Q2 revenue from 2009

08/02/2010 

Semiconductor packaging and test provider Unisem (M) Berhad announced results for the second quarter, ended 30 June 2010 (2Q10).

AMAT findings on virtual metrology

08/02/2010 

James Moyne, Applied Materials, highlights a new technology: virtual metrology. Virtual metrology, on which Moyne presented at ASMC/SEMICON, enables tighter semi fab control using line data analysis. The summarized data is synched with real metrology data. Virtual metrology is now adaptive.

Interfacial properties of Cu-Cu direct bonds for TSV integration

08/01/2010  With varying process conditions, the quantitative analysis of the interfacial adhesion energy of Cu-Cu thermo-compression bonds was performed. Bioh Kim, et al, EV Group, Inc., Tempe, AZ USA; Eun-Jung Jang, et al, Andong National University, Andong, Korea

Process equipment readiness for through-silicon via technologies

08/01/2010  Unit processes, integration schemes, and equipment are in place to enable development and pilot production of TSV technologies and all parts of the value chain do exist today at 300mm to enable integration technology qualification, end-product samples, and limited pilot production. Sesh Ramaswami, Applied Materials, Santa Clara, CA USA

The rule of three for CMP

08/01/2010  Michael A. Fury, Techcet Group, LLC, Del Mar, CA

Overlay error components in double-patterning lithography

08/01/2010  Wafer selection at the beginning of a process could help minimize the effects of shape changes during the wafer processing that may affect overlay error. Venkat R. Nagaswami, et al, KLA-Tencor Corp., Milpitas, CA

Milara debuts wafer handling line

07/30/2010 

The Diamond series atmospheric robots use ultra low inertia, high-response brushless servomotors coupled with zero-backlash Harmonic Drive gears to achieve greatly enhanced dexterity and precision.

Editors' take: TSMC raises capex, but slowdown imminent?

07/30/2010 

TSMC beat estimates with its 2Q10 results, but analysts are taking a more cautious stance amid worries of inventories on the rise and capacity additions slowing down.

Graphene quantized-electron bubble discovery at UC Berkeley to benefit electronic devices

07/29/2010 

Graphene has been found to have a unique property that could make it even more suitable for future electronic devices. When subjected to a 3-point stretch, graphene sprouts nanobubbles with electrons moving as if subjected to a strong magnetic field. The discovery was made by physicists at the University of California, Berkeley, and the Lawrence Berkeley National Laboratory.

Insights from SEMICON: Video interview with blogger Phil Garrou

07/28/2010 

In this video interview, Philip Garrou, microelectronics consultant and Advanced Packaging blogger, offers information on his blog, Insights from the leading edge, and summarizes reasonable roadmaps for 3D technology and TSV in particular. 2012 mainstream adoption seems too aggressive to Garrou.

McPherson intros vacuum UV spectrometer with Pt-coated gratings

07/28/2010 

McPherson’s vacuum ultraviolet (UV) spectrometer, Model 234/302, is now available with improved efficiency over a wide wavelength range. New platinum-coated gratings suit use at windowless wavelengths, shorter than 120nm (>10eV).

Video: Wafer level packaging data from Texas Instruments

07/27/2010 

In this video interview, Dave Stepniak, Texas Instruments, talks about a wafer-level packaging (WLP) trends paper he presented at SEMICON West. He summarizes the paper for senior technical editor Debra Vogler.

MEMS career trends: Specialization, HVM, backend in demand

07/23/2010 

With the US reeling from record unemployment, many are wondering how the MEMS job market is fairing. Neha K. Choksi talks with Jason Weigold, founder and president of MEMStaff, about his observations based on clients' hiring and consulting needs.

Video: Readiness of 3D technologies from a materials perspective

07/23/2010 

Mark Privett, Brewer Science, says that new technologies allow use of higher temperatures as well as room-temperature processes, such as wafer de-bonding. The 3D industry is nearly ready for high-volume, yet still without industry standards.

SEMICON West wrap with JC Kim

07/16/2010 

SEMICON West 2010 wrapped this week in San Francisco. This article includes JC Kim, SEMI Board of Directors Chair, discussing the show and the semiconductor industry future. We also have POVs from the show floor by the ElectroIQ.com bloggers.

Semiconductor fab and packaging in the US: Marcy Nano Center

07/16/2010 

In this video, Timothy Dunn, Marcy Nano Center, discusses building an eco system for advanced semiconductor manufacturing in the US. Marcy Nano Center is pre-permitted and site-ready to build a semiconductor site with a packaging focus, with its academic and industry partners.

Photos from the Applied Materials tour at SEMICON West

07/16/2010 

While we were not allowed to snap photos of the proprietary processes inside Applied Materials, Solid State Technology editor in chief Pete Singer put together these photos with information from the Applied Materials tour. Highlights include a solar-panel roof on the parking area, and discussion of AMAT's new products.

Yield metrology looking at systematic failure mechanisms: Synopsis

07/15/2010 

In this video from SEMICON West 2010, Sagar Kekare, Synopsis, presents ideas from his paper on rapid root cause analysis and process change validation using design-centric volume diagnostics.

EVG discusses the latest wafer bonding system study results

07/15/2010 

In this video from SEMICON West 2010, Marcus Wimplinger, EV Group, summarizes the results of SEMATECH work using EVG's 300mm bonding systems that enables submicron alignment. Highly accruate wafer bonding is used for Cu-to-Cu bonding and other packaging applications.

450mm report: Standards, AMHS, platforms getting ready

07/15/2010 

Tom Jefferson, ISMI's 450mm program manager, gives SST an exclusive rundown of ISMI's closed-door update on 450mm progress at SEMICON West.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

Sponsored By:

Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

Sponsored By:

More Webcasts