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Copper resistivity fixable for 45 nm node, but long-term issues remain, SEMATECH and Novellus workshop reveals

07/07/2005  AUSTIN, TX and SAN JOSE, CA -- (MARKET WIRE) -- 07/06/2005 -- Copper resistivity will remain a challenge for the semiconductor industry, but chip designers are likely to use hierarchical design workarounds to modify the metal for linewidths at the 45 nm technology node, according to participants at an industry workshop sponsored by SEMATECH and Novellus Systems, Inc. (NASDAQ: NVLS).

TEL begins volume orders of immersion process coater/developer CLEAN TRACK(TM) LITHIUS(TM) i+

07/07/2005  TOKYO--(BUSINESS WIRE)--July 6, 2005--Tokyo Electron Limited (TEL) announced today that they will start accepting volume orders for their immersion process coater/developer CLEAN TRACK LITHIUS i+ in January 2006.

Genentech anticipates full-capacity manufacturing

07/07/2005  SAN FRANCISCO, CA--/Pharmaceutical Technology/--Biotech giant Genentech (South San Francisco, CA) last week detailed its aggressive production plan and provided updates of its key manufacturing activities that reportedly will boost its capacity to run at nearly 100% for the next several years.

NeoPhotonics merges with Photon Technology

07/07/2005  The combined company will develop and manufacture integrated optical modules and subsystems designed to improve performance and lower cost.

SMIC reportedly led TSMC in capacity utilization competition in 2Q

07/06/2005  July 6, 2005 - In the second quarter, Semiconductor Manufacturing International Corp. (SMIC) ran its capacity at an 86% rate, higher than the 84% recorded by foundry Taiwan Semiconductor Manufacturing Co., a Merrill Lynch & Co.'s study shows, according to Taiwan Economic News.

Soluris, CEA-Leti form JDP on sub-45nm logic technologies

07/06/2005  July 6, 2005 - Soluris and CEA-Leti have announced that they have engaged a joint development program (JDP) involving Soluris' Yosemite SP-1000 CD-SEM to help characterize the sub-45nm logic technologies at CEA-Leti's new Minatec research facility in Grenoble, France.

Acquisition adds expertise in virus, mycoplasma and bacteria testing and strengthens Millipore's growing services business

07/06/2005  BILLERICA, Mass--July 5, 2005--Millipore Corporation (NYSE:MIL) today announced it has completed the acquisition of MicroSafe, B.V., for approximately $9.3M.

EV Group to support nanofabrication technologies at Stanford with nanoimprint tool

07/06/2005  July 06, 2005 - EV Group, a leading manufacturer of MEMS, nano and semiconductor wafer-processing equipment, announces the installation of an EVG620 precision alignment system for nanoimprint lithography (NIL) at Stanford Nanofabrication Facility (SNF) in Stanford, CA.

ISPE Chicago Training Series to focus on pharmaceutical automated systems, with GAMP(r) Americas Forum and two GAMP training courses

07/06/2005  TAMPA, FL, USA--05 July 2005--Three different sessions addressing Good Automated Manufacturing Practice (GAMP) issues will highlight ISPE's Chicago Training Series, scheduled for 22-25 August at the Eaglewood Conference Resort and Spa in Itasca, Illinois.

Nanoplex spins off from parent

07/06/2005  Nanoplex Technologies, a developer of nanoparticle technology for biotech applications, raised $2.5 million and spun off from its parent.

July 2005 Exclusive Feature: METROLOGY

Detecting profile excursions using spectroscopic ellipsometry



07/05/2005  By M. Yeh, S.-P. Fang, B.-J. Tsau, C.C. Huang, B. Lin, United Microelectronic Corp.; S. Fu, J. Chen, R. Freed, T. Dziura, M. Slessor, KLA-Tencor Corp.

This work evaluates the capability of a spectroscopic ellipsometry-based profile technology as a new metrology tool to monitor polysilicon gate processes at 130nm and 90nm nodes. This study proves that this method can consistently flag different profile excursions of polysilicon gate.

Strategic Business Forum: Why simulation could push designers to start using DFM

07/05/2005  By: Dr. Paula Doe, Contributing Editor

Narrowing process windows, emerging tools for statistical analysis of design, and model-based simulations of yield results may soon push designers to actually design for manufacturability, argued experts at Semi's Strategic Business Forum in Welches, OR, May 9-11.

KUKA Robotics Introduces Industry's Largest and Strongest Clean Room Robots; KUKA Clean Room Robots Designed Specifically for Flat Panel Display Manufacturing

07/05/2005  CLINTON TOWNSHIP, Mich.--(BUSINESS WIRE)--July 5, 2005--KUKA Robotics Corporation, a leading global manufacturer of industrial robots, today announced the introduction to the US market of a family of clean room robots specifically designed for flat panel display manufacturing and substrate glass handling.