Category Archives: Semicon West

January 15, 2007 – Metrosol Inc., Austin-TX, a developer of optical reflectometry systems, has appointed Kevin Fahey as president and CEO, formerly VP and GM of FEI Co.’s fab market division. He will be charged with achieving “rapid sales expansion, operations efficiency, aggressive product positioning, and creating the highest level of service and support,” according to the company.

The company, a participant in the 2006 SEMICON West Technology Innovation Showcase (TiS), sells a short wavelength optical metrology system that collects optical reflectance data in the vacuum ultraviolet wavelength region down to 120nm, targeting applications ranging from engineered substrates and other advanced materials to gate dielectrics and metal gates, silicides, and capacitors. Its flagship product targets frontend 45nm/32nm semiconductor manufacturing; two other tools address R&D with different wavelength ranges and applications.

“Metrosol found itself on target for exponential growth in the semiconductor fab market,” and its directors and management “felt new leadership could expedite the organization to the next level,” the company said, in a statement.

Standard testing of FFU performance provides useful data for better understanding and characterization of FFU products

By Tengfang (Tim) Xu, PhD, PE, Lawrence Berkeley National Laboratory

Lawrence Berkeley National Laboratory (LBNL) is now finalizing the Phase 2 Research and Demonstration Project on characterizing 2-foot x 4-foot fan filter units (FFUs) in the market using the first-ever standard laboratory test method developed at LBNL.1-3

FFUs deliver recirculated air and provide particle filtration control for clean environments. Much of the energy in cleanrooms (and minienvironments) is consumed by 2-foot x 4-foot or 4-foot x 4-foot FFUs that are typically located in the ceiling (25 to 100 percent coverage) of cleanroom environments.

Thanks to funding support by the California Energy Commission’s Industrial Program of the Public Interest Energy Research (PIER) Program, and significant participation from manufacturers and users of FFUs from around the world, LBNL has developed and performed a series of standard laboratory tests and reporting on a variety of 2-foot x 4-foot FFUs. Standard laboratory testing reports have been completed and reported back to anonymous individual participants in this project. To date, such reports on standard testing of FFU performance have provided rigorous and useful data for suppliers and end users to better understand, and more importantly, to quantitatively characterize performance of FFU products under a variety of operating conditions.4 In the course of the project, the standard laboratory method previously developed at LBNL has been under continuous evaluation and update.5 Based upon the updated standard, it becomes feasible for users and suppliers to characterize and evaluate energy performance of FFUs in a consistent way.

Research findings

After numerous peer reviews across industries, this standard energy and airflow test method for FFUs is used to quantify total pressure efficiency and power consumption of FFUs across a range of operating conditions-defined in terms of actual airflow rates (or velocity) and pressure loss throughout the recirculation system. LBNL has tested 17 different FFUs from manufacturers in Asia, Europe, and North America.

Among these, we have seen electric power demand ranging from under 100 W to 400 W per FFU, and huge (in excess of ten times) intravariations in efficiencies depending upon operating conditions dictated by the pressure rise and airflow rates needed and provided by the FFU.

In addition, for a given typical operating condition we have observed variation, by a factor of three or more, in energy efficiency levels from unit to unit. For example, total pressure efficiency is a yardstick for quantifying a unit’s energy efficiency levels, which is defined as the ratio of actual pressure power to total electric power demand for the unit.6

Click here to enlarge image

Two curves in Figure 1 show the FFU efficiency level as a function of percentile ranking developed from the actual standard test data. While the two curves correspond to different operating conditions, respectively, they both illustrate significant variations in energy efficiency from unit to unit. Under the same operating condition, the efficiency level of the most efficient unit (shown at the right-hand side in the graph, e.g., 99 percentile) was as much as over three times that of the efficiency level of the least efficient unit (shown at the left-hand side in the graph, e.g., 1 percentile).

Further analyses of the test data indicate that actual energy performance of the FFU is related to FFU motor type, housing and air-path design, size of the unit, and filtration materials. Much more experimental work needs to be pursued in order to quantify the impact from each of these parameters.

Standard adoption and market impacts

The LBNL standard has been and is being adopted by specifiers and owners to understand FFU performance. The results are used in their process of selecting and purchasing FFUs with better and improved energy performance. In addition, the outcomes of the standard tests are now being considered by utilities seeking to promote applications of energy efficient FFUs. A successful energy-rebate program would allow a utility to provide financial incentive for end users to specify and purchase energy-efficient FFUs. Furthermore, some end users have been proactively pursuing ways to reduce cleanroom operating costs and life-cycle costs by selecting energy-efficient FFUs. For example, in designing and constructing large cleanrooms, some large companies in the U.S. and Asia, including Texas Instruments, have required FFU suppliers or bidders to perform and report characterization tests according to the LBNL standard, which allows provision and comparison of performance data in a consistent way.7

Identifying and selecting energy efficient units in cleanroom applications can bring about savings in energy costs over their lifetimes while maintaining and improving the effectiveness of contamination control.8-14 Through this research and demonstration project, it becomes feasible for end users or cleanroom owners to become better informed of energy performance to aid in their planning and selection for use in new facility construction or renovation. For example, they may now require suppliers to provide a unit’s performance as obtained through the LBNL standard. Also, more FFU manufacturers are becoming motivated to quantitatively understand performance of their units, and to improve design, operation and controls of their FFUs to better serve industries. Furthermore, utility companies or other public interest programs may use the results and recommendations to establish energy-rebate criteria, and implement additional programs to encourage the use of efficient units. Last but not the least, this work will continue to add to and enhance the development of an industrial standard, such as IEST-RP-CC036.1.15

Evaluating and advancing FFU technologies

With energy costs nearly double or triple what they were a few years ago, cleanroom owners industrywide and worldwide are now working toward battling high utility bills as part of curtailing expenses.16 For numerous cleanroom managers and designers, the trends in cleanroom design over the years to come are becoming clearer in that energy and resource conservation, as well as consolidation, are critical.

The increasing energy costs of operating future cleanrooms have not only prompted end users to seek and select higher-efficiency FFUs in their cleanroom applications,17 but have also motivated a number of suppliers to better understand their products and to develop higher-efficiency FFUs for future cleanrooms.18 For example, more and more manufacturers are interested in systematically quantifying the impact of fan-wheel design, sizes of air-path and unit, motor type, and airflow control techniques.

In addition, users are paying attention to airflow uniformity and energy consumption over the lifetime of FFU operation, along with reliability and control readiness in cleanroom contamination control using FFUs. Having such a rigorous test standard available and in place provides a platform for industries to evaluate and advance filtration technologies using FFUs.

While the contamination control industries are moving toward tighter contamination control and increasing desire for higher energy efficiency, it is important to strategize the development and implementation of higher-efficiency FFUs in actual cleanrooms. The following are some important actions that need to be ongoing:

Disseminating new knowledge in testing and results among technical and professional societies and across industries

Providing technical assistance to users and manufacturers to select efficient FFUs and improve FFU performance

Assisting utilities to establish and implement energy-rebate programs to promote FFUs that outperform others

Interacting with relevant professional societies and standard development bodies to further absorb and adopt the refined standard

Acknowledgments

The project is funded by the California Energy Commission’s Industrial Program of the Public Interest Energy Research (PIER). LBNL wishes to acknowledge Paul Roggensack, Anthony Wong, and Pramod Kulkarni of California Energy Commission for their support of this project. This work was supported by the Assistant Secretary for Energy Efficiency and Renewable Energy, Office of Building Technology, State, and Community Programs, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.


Dr. Tengfang (Tim) Xu, PE, is a program manager with Lawrence Berkeley National Laboratory. He can be reached at [email protected].

References

1. Xu. T. and D. Wang. In progress. “Demonstration of Advanced Filtration Technologies: Developing Energy-rebate Criteria through Performing Standard Laboratory Tests and Statistical Analyses.” Lawrence Berkeley National Laboratory Report, LBNL-61684.

2. Xu, T. “Laboratory Method of Testing Energy Performance of Fan filter Units, Version 1.3,” LBNL Report, LBNL-54626, Berkeley, CA (2005).

3. Xu, T. “Laboratory Method of Testing Energy Performance of Fan filter Units, Version 2.0,” LBNL Report, LBNL- 61685, Berkeley, CA (2006).

4. See reference 1.

5. See references 2 and 3.

6. Xu, T. and M. Jeng. “Laboratory Evaluation of Fan filter Units’ Aerodynamic and Energy Performance,” Journal of the IEST 47 (2004): 116-120.

7. See references 2 and 3.

8. See reference 6.

9. Gale, S. “FFUs: Setting a course for energy efficiency,” CleanRooms (September 2004).

10. Xu, T. “Introducing a Standard Testing Method for FFUs,” Controlled Environments (September 2004).

11. M. Jeng, T. Xu, C. Lan. “Toward Green Systems for Cleanrooms: Energy Efficient Fan filter Units,” Proceedings of SEMI Technical Symposium: Innovations in Semiconductor Manufacturing (STS: ISM), SEMICON West 2004, San Francisco, CA. LBNL 55039.

12. Xu, T. “Developing a Standard Method For Evaluating Fan filter Unit Performance-Applications in Utility Incentive Programs,” poster distributed to three major California utilities, California Energy Commission, and other stakeholders (2004).

13. Xu, T., C. Lan, and M. Jeng. “Performance of Large Fan Filter Units for Cleanroom Applications,” Building and Environment, LBNL-58220 (2006).

14. Chen, J., C. Lan, M. Jeng, and T. Xu. (In press). “The Development of Fan Filter Unit with Flow Rate Feedback Control in a Cleanroom,” Building and Environment, LBNL-60530.

15. The Institute of Environmental Sciences and Technology (IEST). Draft IEST-RP-CC036.1: Testing Fan Filter Units. Rolling Meadows, IL. For more information, visit http://www.iest.org.

16. Gale, S. F. “Rising energy costs dictate cleanroom design,” CleanRooms (February 2006).

17. Hogan, H. “Fabs new and old save millions in contamination-control energy costs,” CleanRooms (September 2005).

18. See reference 1.

by Debra Vogler, Senior Editor

At the behest of its board of directors, SEMI has created a new advisory board to foster better communication among device makers and equipment suppliers, and more promptly develop a clear understanding of what semiconductor manufacturing standards will be needed, and by when. The Manufacturing Technology Forum (MTF), a regional- and sector-balanced group representing device manufacturers, consortia, and equipment suppliers (see table), held its formal kick-off meeting in May in Boston, with a second meeting held during SEMICON West, and another scheduled for October in Austin, TX.

The need for the MTF came out of analyzing problems the industry faced during the transition to 300mm manufacturing, according to Bettina Weiss, director of international standards at SEMI, who earlier described SEMI’s MTF and other standards efforts in an interview with WaferNEWS. Looking at the portfolio of 300mm standards — the four groupings of metrics, EHS, software, and hardware — all four are critical, she said. “But research showed that EHS and metrics standards were stabilized early on — there were good, sound approaches — while the hardware and software standards were a bit out of control.”

Weiss explained that the software and hardware standards showed a high frequency of revisions that were indicative of a process gap — e.g., the dialog on user requirements, definitions of tasks, and supplier feedback occurred too late, she explained. The MTF is expected to close the process gap that caused the problems with timing and lack of early industry consensus.

Although the MTF’s focus and scope is very broad, according to Weiss, the initial focus will be 300mm Prime, the International SEMATECH Manufacturing Initiative’s new program to establish an “incremental” approach toward improving 300mm production and ease the eventual migration to the 450mm new wafer size (see news announcement, and strategic analysis. Once the MTF is fully established, Weiss anticipates that it will have strong ties going both to and from the SEMI Standards Program, including the ~1500 industry volunteers who represent their respective organizations on 17 global technical committees and hundreds of task forces. “The MTF will hand down recommendations but will also take requests from the volunteer community,” explained Weiss.

Weiss noted that time-sensitive IC manufacturers do not want to have to go to every single supplier, preferring instead to talk to a group of suppliers that have already reached some sort of consensus. “This is why, alongside the MTF, SEMI has formed an equipment supplier group (ESG) that feeds the collective supplier voice into the MTF,” Weiss told WaferNEWS, adding that eventually MTF also will work closely with SEMI’s Silicon Manufacturers Group (SMG).

Having a voice and the ability to influence standards activities are not the only attractions of the MTF, according to Weiss — one of its biggest assets is enabling discussions in an anti-trust protected environment. She indicated that several companies, on both the supplier and device sides, have expressed interest in closer contact to what their own representatives to the SEMI Standards program are doing. Because these volunteers represent their companies not only during the standards definition/creation process, but also when standards revisions are being voted, knowing what they are doing is key to ensuring continuity, and that companies are speaking with one voice. — D.V.

MTF advisory board, current membership status (as of August 2006)

Consortia……………Device manufacturers……………Equipment suppliers

ISMI…………………….Samsung……………………………….Applied Materials
JEITA…………………..Intel……………………………………….TEL
…………………………….STMicroelectronics……………….Asyst
…………………………….NEC………………………………………DNS
…………………………….Toshiba…………………………………Nikon
…………………………….TSMC……………………………………Murata Machinery
…………………………….IBM……………………………………….Hitachi High Tech
…………………………….AMD……………………………………..KLA-Tencor
…………………………….Infineon

Source: SEMI

by Ed Korczynski, senior technical editor, Solid State Technology

During SEMICON West 2006, a group of the industry’s top senior technologists came together to discuss the limits and possibilities for semiconductor material development. The technical seminar and panel discussion, sponsored by DuPont Semiconductor Materials, and moderated by this author, addressed material issues in the major International Technology Roadmap for Semiconductors (ITRS) initiatives.

One of the main themes of the panel discussion involved the ramifications of a clear shift toward dealing with individual countable atoms, a theme that carries into other parts of the industry — such as in lithography for topcoats on resist, atomic layer deposition for interconnect barriers, or transistor gate dielectrics. Panelists expressed a bit of anxiety, yet clear optimism about what kind of endgame does this trend lead to in terms of materials development, here’s what the panelists had to say.

While admitting that scaling to a level that requires counting individual atoms “terrifies us,” Dan Herr, director of nanomanufacturing sciences research, Semiconductor Research Corp., pointed out an array in which placing individual implant dopants gives new functionality not seen before. Incorporating nonlinear materials to add functionality is “a playground we haven’t played in yet, and I think it’s just the beginning of a whole new era,” he said. “So, I see it as a new frontier.”

Raj Jammy, director for front end processes, SEMATECH, added that this trend is really about “meticulous manipulation at the atomic level,” beyond just shrinking things down to ever smaller dimensions. “How do you get more functionality by trying to arrange or rearrange those atoms? I think that’s going to be the name of the game.”

Robert Havemann, VP of process integration, Novellus Systems, pointed out that counting individual atoms is already happening, noting that in ALD processes, throughput actually improves with further scaling because fewer cycles are required. Also, for interconnects, grain boundary scattering has been mostly resolved by optimizing the anneal to get very large grains and minimize electron collisions. “Sidewall scattering means we have to engineer the interface between the copper and the barrier much more carefully, and this is an atomistic engineering problem,” he said. Still, Havemann said that while he finds carbon nanotubes “to be very interesting” and will monitor their development through the SRC, he is “still pretty bullish” about the extendibility of copper.

Larry Thompson, president of Intellectual Property Services & Solutions LP (IPSS), and former director of advanced lithography and chemical engineering at Bell Labs, brought up a topic familiar to this industry, and one with keen interest to developers of leading-edge technologies seeking to avoid having the rug pulled out from under them (remember 157nm lithography?). He showed a graphic tracking historic aircraft speeds (see image, below), with a plateau just below supersonic speed — suggesting that while something is technically feasible, e.g., the Concorde, it may not be economically supported — e.g., higher fuel costs, unique and more expensive design/manufacturing costs, etc. Responding to an audience member, Thompson stated that “the Concorde of our industry is EUV lithography — if it has to be used. A $60 million tool that exposes 10 wafers an hour isn’t feasible.”

SEMATECH’s Jammy offered another perspective, pointing out that device scaling has gone on for years and has now arrived at atomic levels. The reason behind the scaling was purely economic — the smaller they are, the more we can fit, and the cheaper they become, he said. “Now perhaps the paradigm shifts in a different direction. If we’re frozen at a certain length or scale, how do you still make it cheaper? How do you manipulate, and how do you make that manipulation process cheaper? I think the scaling activity will continue in a different direction.” — E.K.

Next week WaferNEWS will present more discussions from the DuPont panel at SEMICON West, involving ideas for new materials business models.

What do you think is the “Concorde” of the semiconductor industry — or is there more than one?

by Phil LoPiccolo, Editor-in-Chief

Prodded by recent advances in photovoltaics (PV), the US government, after decades of indifference, is aggressively promoting further development and use of the technology as a means of addressing our current energy crisis, according to Rhone Resch, president of the Solar Energy Industries Association (SEIA). Speaking at the SEMICON West conference, Resch explained why, given the newly budgeted federal funding for R&D in PV and new federal incentives to spur installation of consumer and commercial systems, the time is right for high-tech companies to pursue opportunities in solar power.

According to Resch, a lot of people ask: ‘What ever happened to solar power? Where did it go?’ “What happened is that the US government turned its back on the solar energy industry, and an entire generation of solar power has been ignored,” he said. “The Reagan Administration got rid of all tax incentives and slashed funding for R&D, and there has been only private-sector money for developing this industry over the last 20 years.”

Despite a lack of federal support, however, the price of solar power has dropped 95% in the last two decades, Resch noted. Currently, the cost of solar electricity is between about $0.20-$0.40 per kilowatt-hour (kWh), which is still more expensive than other on-grid options today, he said. “But we anticipate that in the next 10 years the price will come down to less than $0.06, a price at which it will be the lowest-cost option for electricity at the retail level.”

The other thing that happened to solar power is that the industry has become the fastest-growing sector of the energy market, Resch noted. Over the past six years, for example, shipments of PV rose from less than 300MW in 2000 to nearly 1800MW in 2005, nearly a 40% CAGR.

The answer to the question “Where did solar go?” is, basically, Germany and Japan. Resch pointed out that in 1995, the US was the global leader in PV manufacturing, with some 45% market share. Today, the US accounts for only 8% of production, he said, because manufacturers in Europe, Japan, and the rest of world have been scaling up at a much faster rate (see figure, above). Germany is currently dominating the market, having doubled PV installations in 2004 from 400MW to 800MW, and adding another 300MW last year. Over the past six years, PV installations in Germany have risen at a CAGR of 80%, thanks in large part to the country’s feed-in tariff program, under which power companies pay consumers a fixed fee for the power they upload from their PV systems to the energy grid.

Although the US has been losing ground, its potential PV market is enormous, Resch contends. “The US has the best solar resources of any developed country in the world,” he said, pointing to a map showing the amount and intensity of sunlight available per year for the entire country (see figure, below). Many areas, particularly in the Southwest, have what are considered “world class” solar resources, he explained, noting that, by comparison, Germany’s solar resources are roughly equal to Alaska’s.

What can be done to develop the market in the US? “What we see from a policy perspective is that the states have been driving energy policy over the last decade,” Resch said. Indeed, thus far, about 20 states and the District of Columbia already require a portion of their electricity capacity to be supplied by renewable energy sources.

To give some perspective, in Arizona and California, alone, the new demand for solar energy is expected to be between 7-8GW over the next decade, Resch said. In comparison, the nuclear industry has announced that over the next 10 years, it is going to build 6-8GW of new power plants. “So the solar industry is going to be moving ahead quite significantly just with the state policies that are in place today,” he said.

Moreover, in addition to these state programs, the federal government appears to taking a much more aggressive role in promoting the use of solar energy. In August 2005, Congress enacted the Energy Policy Act (EPAct), which included several provisions that are significant for those in the solar business or who want to install solar systems in their homes. One stipulated that, for the first time in 20 years, the federal government would offer a residential tax credit (totaling 30% over two years, capped at $2000) for PV installations and domestic solar water heating (DSWH) systems. Another provision specified a 30% commercial tax credit, with no cap, to cover equipment and installation costs for all technologies, also for two years. Other key ingredients of EPAct specified that the federal government would buy 150MW of PV systems, as well as sell Clean and Renewable Energy bonds, guarantee loans, and increase in solar R&D to $250 million annually.

Encouraged by the renewed federal support for solar power, SEIA is working to extend and expand the solar tax credits. In fact, Resch believes that a bill currently being negotiated in the House and Senate will extend the time limit for tax credits to a minimum of three years, and more likely five or possibly eight years, and also expand the amount of the residential credit.

If implemented, such incentives could have a huge impact on economic growth. In fact, SEIA created a Roadmap — based on today’s best-case solar electricity cost of $0.18/kWh, going down to about $0.06/kWh in 10 years — that projects a 20GW market in the US. “At that point, we’d be talking about creating somewhere on the order of 50,000 jobs in the US,” said Resch. “That’s very powerful with members of Congress, and there is a whole new emphasis on the use of solar energy and solar R&D.”

Indeed, the Bush administration and those on Capitol Hill appear to be recognizing the advantages of solar power — namely, that the supply is endless, and it is the cleanest form of energy, generating no air, water, or noise pollution, and no radiation or solid waste. “These become more important when you look at key drivers for energy prices in the future, including grid stability and the rising cost of water (especially in the Southwest), natural gas, and other fossil fuels,” said Resch, also citing national security, energy independence, and climate protection as major benefits.

“When President Bush said that we are addicted to oil, that was a great recognition of our situation,” said Resch. “But while the first step of any addiction is recognizing that you have a problem, the second step is doing something about it.”

To that end, the administration did create a series of different initiatives to begin to address not necessarily our oil addiction, but some of our energy challenges, Resch said. One of these is the Solar America Initiative, a 10-year competitive research program designed to drive down the cost of solar power.

“There is going to be substantial money available,” Resch said, explaining that while in 2005 and 2006, PV research will have received $65 million and $60 million, respectively, going forward, the R&D budget for solar will double to about $130 million/year. “There are spectacular growth opportunities,” he said, “especially for high-tech companies who want to get involved in this industry.” — P.L.

Is PV a big future growth area for your business? How much emphasis should the semiconductor industry give to this market segment, vs. other high-growth areas?

SOLAR ENERGY: Part I:


August 15, 2006

By Bob Haavind, Editorial Director, Solid State Technology

While many potentially disruptive photovoltaic (PV) technologies are taking shape in laboratories, commercialization is often stalled by a lack of suitable tools for production. Vendors setting up production lines tend to make do with whatever process equipment is available, which keeps even mainstream production from being optimal. The bottom line: emerging solar industry needs help from equipment makers — or else PV companies will be forced to develop their own production tools to get new technologies into the market, charged Lawrence Kazmerski, director of the National Center for Photovoltaics, Golden, CO, at a SEMICON West panel on solar technology.

“Equipment is a huge issue,” Kazmerski said, “It’s Neanderthal compared to semiconductors.”

Germany and Japan are far ahead of the rest of the world in developing solar energy, together accounting for 70% of the world’s PV industry, with the US a distant third at 11%, indicated David Hockschild of PV Now, a California solar industry advocacy group. Of the top ten companies in the industry, including Sharp, Kyocera, Shell, and BP, none are from the US, he added.

California is by far the leading solar market in the US, accounting for 71% compared to 2.5% for New York in second place, followed by a few other states like Arizona and North Carolina. Yet the potential for this technology is huge in the United States, according to Hockschild, because it receives far more solar energy than countries such as Japan, China, and others.

San Francisco is so anxious to get away from conventional power plants, he explained, that a $100 million solar bond issue in 2001 won by 73% of the vote. One of the first projects at Moscone (where the SEMICON West show is held) involved several energy-saving measures along with a $3 million solar panel installation.

“The light bulbs were essentially heaters that emitted a little light,” Hockschild said, so new lamps were installed that not only are more energy-efficient, but also boosted light levels by 30%. The $7 million investment at Moscone will be paid back in eight years, he added.

Every time the solar industry doubles, costs go down about 20%, Hockschild estimates. He rattled off an array of successful showcase projects around the world, including rows of homes in the Netherlands with solar-integrated skylights and the “Carlisle House” in Massachusetts which feeds power back to the grid. He agreed that the US trails several other countries in developing and using alternative energy systems, but he cited efforts to push US efforts. Congress passed a 30% tax credit for solar installations, for example, and six states plus Washington, DC, now have solar set-asides.

There was “unanticipated euphoria” when a budget of $148 million was announced to back a Solar America Initiative this year, according to Kazmerski of the National Renewable Energy Laboratory — but Congress keeps chipping away at the program, which is now down to $139 million. Development efforts are built around a Solar Roadmap, with R&D focused on “closing the gaps,” both in technology and commercialization. He expects the nation will have 5-10GW of solar power installed by 2015, with California alone aiming for 2GW by 2016.

Still, these efforts pale in comparison to Japan and Germany. Kazmerski explained that in Japan, each home with solar power is paid 63 cents/kWh — more than it would cost for power from the grid. As a result, he added, some Japanese actually build systems on their neighbors’ roofs to take advantage of the subsidy. Japan hopes that its aggressive support will mean that by 2050 solar power will supply half of the nation’s electricity.

Germany’s program uses no federal money — instead, every user of grid electricity pays an extra incremental fee to support the cost of solar installations, Hockschild explained. The utilities thus provide a pool to pay back these costs over a 10-year period, and the electric companies also provide credits for solar-generated electricity fed back into the grid.

Photovoltaic technology is steadily evolving, according to Kazmerski. There are many exotic cells under development, but 95% of the solar panels installed so far use crystalline silicon — in fact, in 2005 over half of the world’s silicon wafer production went into solar energy production, he explained. The initial cells from Bell Labs in 1953 had less than 1% efficiency, but even so, by November of the following year the first modules were installed. Since then, he said, some 1.7GW of solar energy has been sold.

Three companies now make crystalline silicon PV cells with over 20% efficiency, according to Kazmerski. The most efficient silicon cells from SunPower have a surface roughed into tiny pyramids to bounce light around and they have anti-reflective coatings to capture more energy from the light. Efficiencies of 28%-29% can be achieved with more exotic materials, such as cadmium telluride and copper indium selenide, he said, and five companies in the Bay area alone have been set up to commercialize these technologies.

On space missions, gallium arsenide has displaced silicon, and concentrators enable efficiencies up to 39%. Soon, according to Kazmerski, multijuntion concentrator solar cells, with different materials tuned to varying parts of the sun’s spectrum, will push efficiencies over 40%. Originally, it was thought that large fields of solar panels would generate electricity to be distributed to nearby communities, but the localized power generation approach, with panels on rooftops, now leads the way instead. But the rising efficiencies of concentrator technologies, and the much higher cost of fossil fuels, may lead to more centralized power generation as well, particularly in highly sunlit areas such as Southern California, New Mexico and Arizona.

Down the road ten years and beyond, Kazmerski envisions disruptive technologies pushing photovoltaic efficiencies up to 50%, 60%, or even 70%. “But that may be 30 years away,” he cautioned. — B.H.

By Debra Vogler, Senior Editor

Anytime government gets into the act of giving money to any endeavor, one can almost imagine the industry holding its collective nose with a clothespin. The money is welcome, but the intrusion that may go along with it is not. Guests of SST On the Scene at SEMICON West shared their thoughts about government getting more involved, and what challenges the industry is facing now when it accepts such help. [CLICK HERE for the full list of interviews]

Kevin Fahey, GM of the FEI Co.’s nanoelectronics fab division [CLICK HERE TO WATCH THE VIDEO], sees more of a mix in the way research is funded going forward. “It used to be that governments would fund everything from five years out or more¿you’d start to see venture money in the 2-5 year range, and companies in the 0-2 year range,” Fahey said. But now, “Everything is sliding forward — the VCs want their money back in 12 months, and the companies want to be seeing results in six months.”

As a result, there is more of a need for government money for things that will be in production within a couple years, Fahey thinks. “The easiest way to see this manifested is to look worldwide,” he said. “In this country, we tend to be used to the standard funding cycles. But if we look to Europe, we’re starting to see country-wide collaborations with national centers for microscopy and materials development.” Looking to the future, he said that there’s growing acceptance that governments will be involved whether it’s wanted or not. “You see places like Singapore, where there’s wonderful success from the government having helped out,” he noted.

David Dutton, CEO of Mattson Technology [CLICK HERE TO WATCH THE VIDEO], thinks government participation is most effective when it understands how it can make free-market trade happen, such as incentives in certain areas or a lower tax base. “To me, it seems that government helps facilitate business¿[when] people get in there and start competing, then the business grows, and research happens because there’s a market to be driven to,” said Dutton. He offered as one example the Saxony area of Germany, which helped enable the first 300mm production in Dresden. “Government involvement has been more to facilitate and put in the right incentives to foster business and grow, and I think that’s what governments need to do.”

Scott Kramer, director of ISMI at Sematech [CLICK HERE TO WATCH THE VIDEO], cited the semiconductor industry’s influence as one reason for government involvement. “It makes good sense for governments to be involved in some aspects of the [semiconductor] industry¿it’s so large now, it’s influential, it employs a lot of people¿so governments are stakeholders, along with private companies and universities,” said Kramer. “I think the important point from our standpoint in the IC industry is that there be a level playing field without artificial boundaries and let the technology innovation go as fast as it can.” Kramer also believes that universities will continue to play a key role in innovation. “University campuses are still the ideal place for breakthrough, nonlinear thinking, and we don’t see that changing,” he said. — D.V.

By Debra Vogler, Senior Editor

Furtive glances across a stuffy room, strident objections, consensus-building conducted in a corner, and plastic forks stabbing at salad in box lunches — these could be scenes from a union negotiation meeting, or perhaps midlevel managers debating the merits of a new product. It also might describe business as usual in a SEMI standards meeting.

In a former life as a reliability engineer, this author was involved in the world of consensus-building ad infinitum. Seeing my fellow comrades at a SEMI Standards reception at SEMICON West a few weeks ago was a reminder of the challenging work undertaken day in and day out by those who represent equipment and materials suppliers on SEMI standards committees. So I asked those still active in SEMI Standards, whether developing and negotiating standards had gotten any easier — or, perhaps, whether the process of creating standards has changed significantly, now that just about everything in the industry is played out against the backdrop of myriad partnerships, alliances, and consortia.

Those involved in updating and maintaining standards are “A slowly diminishing, small core group of interested parties,” observed Jim Irwin, principal at I/C Irwin Consulting. “Few leaders ‘out there’ seem to care very much about using the standards — still.” He noted that there is no driving force behind those using the equipment performance and productivity standards — the safety standard (S-2) has the horsepower of ESH law behind it, for example, but equipment performance and productivity standards do not. Irwin added that “what gets measured, gets done or improved,” underscoring the belief that if standards are to be effective, a driver needs to be found to measure their value. “SEMI marketing activities around standards, especially to users at the highest management levels, have been ineffective in the past.”

SEMI has heard the rallying cry for measuring standards efforts. According to Bettina Weiss, director of international standards at SEMI, the organization has been collecting data for several years — looking at everything from demographics per committee per region, to balloting, approval, and publication times, as well as sales and marketing. “With the exception of budget-related issues, this data has been shared with regional standards committees, technical committees, and special project groups within the program on a regular basis,” noted Weiss. “Internally, we have used this data to develop targeted marketing/messaging approaches for specific program aspects such as, recruitment/outreach, standards usage and acceptance, staff prioritization, and so on.”

Aside from its efforts to measure effectiveness, SEMI acknowledges that the process is open to abuses. “We have been trying to curb what a committee/task force deems to be not constructive behavior by strengthening communication channels among the [standards] author/task force leader/voting members who object to a document,” explained Weiss. For example, SEMI is actively addressing the use of what have been characterized as “philosophical negative votes” (i.e., “because I don’t like it”), and standards leaders are encouraged to resolve such conflicts before a standard is brought to a vote in the committee.

Among other changes SEMI is trying to enable within its standards program is deeper integration between SEMI committees — and the changes are being noticed. “A good example is that the E116 (Equipment Performance Tracking — EPT) committee, which was developed in the ICC [Information and Control Committee], is working closely with the Metrics Committee to ensure that E116 is aligned with E10 (RAM), E58 (ARAMS), and E79 (OEE),” noted Tom Pomorski, principal consulting engineer for Brooks Automation. “In fact, a joint E10/E79/E116 working group was formed to ensure that these standards ‘play nice together.'” The Metrics Committee Education and Adoption subcommittee also shares leadership with the ICC.

Pomorski also sees progress with respect to integrating the metrics standards with production systems, citing two ways in which this is occurring. “Performance and productivity monitoring provides near real-time feedback on production system variation allowing rapid response and control/correction,” he explained. “Historical performance/productivity data provides a foundation for factory continuous improvement programs such as TPM, Lean, and Six-Sigma.”

Irwin told WaferNews that he was surprised to see a beehive of activity about productivity at SEMICON West this year, as well as seeing The Goal [by Eliyahu Goldratt and Jeff Cox] on the bookshelves of some fab managers he has visited in past years. “That suggests there is a certain place for productivity thinking,” he said. “Everyone understands the possibility when times are ‘rocking’ [in the industry]…but I’ve always gotten that deer-in-the-headlights look when I ask, ‘What’s the possibility for productivity thinking during flat or down times?'” He is hopeful that as people go from thinking about productivity to doing something organized about it, they will be begin to appreciate what the book and other resources have to say and offer in the way of services.

To facilitate discussions between device manufacturers and suppliers, and foster what Weiss characterizes as a better, data-driven and consensus-based assessment of what standards will be needed and when, SEMI established a Manufacturing Technology Forum (MTF) in May of this year. “The MTF seeks to start the dialog much earlier, with device makers and suppliers in lockstep and with a much clearer understanding of what will be needed to stay on target,” observed Weiss.

A harbinger of what standards experts have been seeking may be on the horizon. “From my perspective, we are witnessing a trend away from technical specifications and test methods for the industry, toward a more business-inspired approach where economic impact, cost assumptions, and productivity considerations now play a significant role when identifying an area where standards can help reduce cost,” she said. — D.V.

Among the questions explored in 14 video interviews conducted at SEMICON West are the following:

  • Are finishing fabs the answer to the industry’s economic challenges going forward?
  • Are ever-larger consortia and alliances feeling growing pains, or does size drive momentum for solutions?
  • As the government gets more involved in basic research, will you be happy that someone from the government is there to help you?
  • Will high-throughput e-beam direct write lithography be ready in time for the 32nm half-pitch?
  • Is there a solution to the raw polysilicon availability crunch?
  • Are universities competing “too much” with industry?
  • Is scheduling invention possible?
  • Hear what industry executives have to say about these and other issues.

    Click the links below to see each video clip. If you are running a pop-up blocker, please hold the CTRL key when clicking, to allow the video segments to open.

  • Kevin P. Fahey, GM NanoElectronics Fab Division, FEI Company
    [100kbps]
    [256kbps]
  • David L. Dutton, CEO of Mattson Technology
    [100kbps]
    [256kbps]
  • Ted Vucurevich, Sr. VP, CTO, Advanced Research & Development, Cadence Design Systems, Inc.
    [100kbps]
    [256kbps]
  • David Lam, chairman, David Lam Group
    [100kbps]
    [256kbps]
  • Francois J. Henley, President and CEO, Silicon Genesis
    [100kbps]
    [256kbps]
  • Scott Kramer, Director of ISMI, SEMATECH
    [100kbps]
    [256kbps]
  • Ludo Deferm, VP of Business Development, IMEC
    [100kbps]
    [256kbps]
  • Andr