Lithography

LITHOGRAPHY ARTICLES



SUSS launches nanoimprinting tools

12/12/2002  SUSS MicroTec AG said it has launched new embossing equipment for nanoimprinting technology.

EFP begins testing nano-environmental mask

12/04/2002  DEC. 4- LAS VEGAS--Emergency Filtration Products Inc. (EFP) has begun testing its nanotechnology-enhanced 2H Technology filtration system to be incorporated into an environmental isolation mask.

DuPont Photomasks reduces headcount

12/04/2002  Dec. 4, 2002 - Round Rock, TX - DuPont Photomasks Inc. plans to streamline its European operations by consolidating trailing-edge photomask production in Rousset, France and Hamburg, Germany, into its manufacturing facility in Corbeil, France. These initiatives are expected to reduce the global workforce by approximately 8%, or 140 positions, once fully implemented.

SPECIAL STAFF REPORT: An OASIS by the sea at BACUS 2002

11/29/2002  The atmosphere of the 22nd BACUS Photomask Symposium, held recently in Monterey, CA, was oddly upbeat, with a record 156 papers and high attendance, in spite of depressed industry conditions. The mask industry has been hard hit by the slow shift to 130nm and beyond, since most of industry revenue comes from such advanced reticles.

New Jersey pools its resources for faster-to-market small tech

11/12/2002  The goal of the New Jersey Nanotechnology Consortium, a nonprofit corporation headquartered at Bell Labs, is to leverage the center's 40 years of experience commercializing technology. CTO Om Nalamasu says that companies that want to unlock the commercial potential of small tech need to pool resources.

Small Times magazine announces Best Of Small Tech Award winners

11/12/2002  Small Times magazine has announced its 2002 Small Times Magazine Best of Small Tech Awards, recognizing the best people, products and companies in nanotechnology, MEMS and microsystems.

Shipley Co., Numerical partnership for low K1 lithography imaging

11/01/2002  Nov. 1, 2002 - Marlborough, MA - Shipley Company L.L.C., a provider of electronic materials and process innovations for advanced circuit board technology, semiconductor manufacturing, and advanced packaging, has established a partnership for low k1 lithography imaging with Silicon Valley-based Numerical Technologies Inc.

Cymer to open new facility

10/25/2002  Cymer Inc. is to build a new manufacturing facility for its advanced lithography light sources, and will implement a new organizational structure. The new facility is designed to accommodate the high-volume production of the company's light source portfolio. This will include the new XL Series product line, which utilizes the dual-gas-discharge-chamber Master Oscillator Power Amplifier (MOPA) architecture.

Sematech and DuPont forge test photomask cross-licensing agreement

10/22/2002  Oct. 22-Austin and Round Rock, TX-Through a recently signed cross-licensing agreement, International Sematech (ISMT) and DuPont Photomasks have combined their intellectual property (IP) for producing test photomasks. The goal is to use test masks based on the combined IP to strengthen industry standards for photomask inspection and repair systems at the leading-edge technology nodes.

QinetiQ launches MEMS prototyping

10/22/2002  QinetiQ has launched a new program for MEMS prototyping, according to Semiconductor Business News.

Nikon files complaint in US

10/21/2002  Oct. 21, 2002 - Belmont, CA - Nikon Corp. and Nikon Precision Inc., a wholly-owned subsidiary located in Belmont, have filed a patent infringement action against ASML Netherlands BV, a Dutch corporation and ASM Lithography Inc., a US company in the US District Court for the Northern District of California, asserting infringement of eight Nikon patents relating to primary structures in stepper and scanner machines.

NanoOpto stays on track despite
hard times, releases new products


10/21/2002  With no need to rely on federal grants or contracts, and already making money off sample sales of its light beam management subcomponents, NanoOpto Corp. is pressing ahead with new offerings – integrated layers of two or more of its present products, plus new phase management devices. Staying on track is big news in today's economic climate.

Corning gets CaF2 lens blank patent

10/08/2002  Oct. 8, 2002 - Corning, NY - Corning Inc. has received a US patent for a calcium fluoride (CaF2) lens blank that supports the advancement of CaF2 materials for the 193nm and 157nm microlithography systems.

IBM looks to nano self-assembly
for semiconductor industry future


09/12/2002  Nanotechnology and nanomaterials will be critical to solving the semiconductor industry’s formidable challenges, said John Kelly, IBM senior vice president and a keynote speaker at the Albany Symposium on Global Nanotechnology. Kelly said IBM is looking toward a future in which circuitry patterns are made through molecular self-assembly.

HP builds molecular memory
with unprecedented density


09/09/2002  Nanoscale computing took a significant step forward today with Hewlett Packard's announcement that it has fabricated a 64-bit array that switches molecules on and off inside a grid of nanowires only a square micron in size. The prototype circuit has 10 times the density of today's RAM memory chips. The first market for the technology would be flash memory for portable devices.

Bulky mask data sets create storage problems

09/04/2002  As mask data sets become more complex and data-intensive, maskmakers face the challenge of how to manage large amounts of data that must be moved from design to mask.

SUSS MicroTec Introduces Mask Aligner for 300 mm Packaging Applications at SEMICON West

08/30/2002  SAN JOSE, Calif.- July 15, 2002-SUSS MicroTec today announced the MA300Plus, a full field proximity Mask Aligner addressing the growing demand for advanced packaging tools capable of processing wafers with diameters of up to 300 mm.

Ultratech Unveils First Line of Nanotechnology Lithography Steppers

08/30/2002  New NanoTech(TM) Family Builds on Ultratech's Proven Technology Expertise to Provide Highly Flexible, Productive and Cost-Effective Steppers for Emerging Markets

nPoint expands line of nano tools

08/28/2002  nPoint Inc., a Wisconsin-based provider of precision motion devices and controllers, has launched a new tool to its line of nanoscale motion and control products.

NanoInk writes its own ticket
using quills on the nanoscale


08/19/2002  NanoInk, a mere seven months old, has released its first product: a software-and-supplies package that turns any atomic force microscope into a Dip-Pen Nanolithography machine that's targeted to research labs. Now comes the hard part – making a bunch of AFM pen tips work in an array large enough for manufacturing. The company promises an array product by early 2003.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

Sponsored By:

Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

Sponsored By:

More Webcasts