Materials and Equipment

MATERIALS AND EQUIPMENT ARTICLES



SUSS EUV lithography mask management system debuts with imec install

07/13/2011 

SUSS MicroTec unveiled MaskTrack Pro InSync, a holistic in-fab EUVL mask management product that synchronizes mask cleaning, handling, inspection, and storage.

Henkel develops die attach film for leadframe packages

07/13/2011 

Henkel worked with STMicroelectronics (STM) to qualify Henkel's Ablestik C100 conductive die attach film materials for scalable, adaptable leadframe packaging.

SPTS management buyout wins Bridgepoint investment backing

07/10/2011 

SPP Process Technology Systems (SPTS) received the investment backing of private equity firm Bridgepoint for a management buyout from parent company SPP.

Canon enters back-end packaging market with lithography tool debut

07/08/2011 

Canon Inc. made its first foray into the semiconductor back-end packaging equipment market with the new FPA-5510iV for through silicon via (TSV) and bump lithography.

Robotic die bonder upgrades SET packaging platform

07/08/2011 

The FC300R performs chip-to-substrate bonding, chip-to-wafer assembly, and chip-to-chip stacking for flip chip, through silicon via (TSV), and other advanced packaging processes, with a robotic handling system for fragile and diverse substrates/wafers.

Plasma tool from Nordson MARCH handles 5 wafer sizes

07/07/2011 

Nordson MARCH introduced the FlexTRAK-WF low-cost, cassette-based automated plasma treatment system that handles five wafer sizes with minimal hardware change-over.

Avantor, SACHEM selective etch chemisty doubles as wafer cleaner

07/06/2011 

Avantor Performance Materials will launch the first in its new J.T.Baker SLCT Series of selective etch surface treatment chemistries, SLCT 128 sigma etchant, at SEMICON West. The product results from a partnership with etch specialist SACHEM.

Novel organic semiconductors from SmartKem best amorphous silicon

07/05/2011 

SmartKem Limited tested its advanced semiconductor materials against amorphous silicon at the National Printable Electronics Technology Centre, where it achieved better thin-film transistor (TFT) mobility rating.

Elpida begins sampling 8Gb DDR3 SDRAM

07/05/2011 

Elpida Memory is now sampling a new 8Gb TSV DRAM consisting of four 2Gb layers based on TSV stacking technology.

IDM records lower cost of test with Multitest DuraKelvin

07/04/2011 

Multiest released data from an international IDM's high-volume production site, tracking its DuraKelvin test contactor's FPY and cleaning downtime.

AVS-ALD, Day 2: Manufacturability takes center stage

06/29/2011 

At this week's AVS/ALD Conference, Intermolecular's Chi-I Lang reports on Day 2 highlights: faster and more flexible approaches to ALD processing, integration challenges with platinum ALD, a peek behind the curtain of equipment development, and the unique challenge of vendor support for high-volume manufacturing.

Korean IDM orders NEXX tools for WLP metallization

06/28/2011 

NEXX Systems installed 2 300mm Stratus deposition at a Korean IDM for high-volume wafer-level packaging processes.

AVS-ALD, Day 1: Interface engineering, rabbit ears and Roy Gordon

06/28/2011 

Intermolecular's Chi-I Lang reviews highlights from the opening day of this week's AVS/ALD Conference, with key themes in interface engineering, the need for better control, and monitoring interface quality using in-situ STEM.

Heidelburg Instruments options circuit-shrinking lithography tech

06/24/2011 

Heidelberg Instruments optioned University of Colorado Boulder's technique for shrinking copper circuits by zapping a substrate with two separate colors of light beams.

SWeNT CNT packs visible-light cancer therapy punch

06/24/2011 

SouthWest NanoTechnologies' single-wall carbon nanotubes demonstrated absorption of indocyanine green, a functional dye with unique photomechanical, photochemical, and photobiological properties

KLAC joins SEMATECH EUV efforts

06/21/2011 

KLA-Tencor will join SEMATECH-led efforts to identify and eliminate defects in EUV lithography, including mask metrology infrastructure and metrology source development.

SRC and SEMATECH remove toxic nano contaminant from CNTs

06/20/2011 

SEMATECH, SRC, and UT Dallas have identified and removed a toxic contaminant in one type of single-walled carbon nanotube (CNT). The process could easily be moved into semiconductor fabs.

Graphene market skyrocketing through 2020

06/16/2011 

Figure. Global market for graphene-based products, 2009-2020 ($ millions). SOURCE: BCC ResearchThe global graphene-based product market value will grow to $67 million in 2015, and $675.1 million in 2020, according to BCC Research's new report, "Graphene: Technologies, Applications, and Markets" (Report ID: AVM075A).

LORD underfill encapsulant designed for lower cost

06/15/2011 

LORD ME-555 LORD Corporation launched the ME-555 underfill encapsulant for semiconductor packaging and assembly. LORD ME-555 is a high-purity, semiconductor-grade epoxy underfill for encapsulating flip chips.

Metryx joins semiconductor equipment assessment group SEAL

06/14/2011 

Metryx will work with IMEC and Intel via the joint European Semiconductor Equipment Assessment Leveraging Innovation (SEAL) project to assess high-resolution mass metrology viability at 20nm and smaller nodes.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

Sponsored By:

Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

Sponsored By:

More Webcasts