Issue



Table of Contents

Solid State Technology

Year 2010
Issue 1

COLUMNS

Editorial


Life after the

Pete Singer, Editor-in-Chief


Industry Forum_2


Innovation on the interface between disciplines

The semiconductor industry is positioning itself on the plane of two complementary axes—the traditional scaling or More Moore axis, and the More than Moore axis. Luc Van den hove, IMEC, Leuven, Belgium


DEPARTMENTS

World News.html


World News


Tech News


IMAPS 2009: Fusion bonding for 3D/TSV, wafer-level/multichip packaging for MEMS


Tech News


Getting greener: New fab EHS benchmark tool debuts


Tech News


Improved tungsten deposition for 3Xnm logic, memory


Product News.html


Product News


FEATURES

Cover Article


All-wet stripping process for highly implanted photoresist

An all-wet photoresist removal process has been developed that reduces the number of process steps and eliminates the potential for plasma-induced substrate damage, while minimizing substrate material loss. Ron Nan, Freda Lee, Jey Hung, SMIC, Shanghai, P.R.C.; James. M.M. Chu, Jack Yuan, David Yang, FSI International, Hsinchu, Taiwan R.O.C., Jeffery W. Butterbaugh, FSI International, Chaska, MN USA


Technical Forecast


Executive viewpoints: The recovery has arrived!

The conventional wisdom is that scaling will continue at the traditional pace defined by Moore's Law well into the future. To gain insight into what technologies will be required , and what impact the recent downturn had on technology development, leading executives provide their perspectives on what 2010 will bring.


Technical Forecast0


For 2010, marketplace optimism abounds

Booming. Recovery. Upturn. Choose your favorite optimistic word, and that is what many analysts surveyed by Solid State Technology are projecting for the semiconductor market in 2010.