Wafer Processing

WAFER PROCESSING ARTICLES



SMIC, TSMC drop swords; SMIC's Chang out, Huahong NEC's Wang in

11/10/2009 

After losing a court case, Chinese flagship foundry SMIC is giving 8% ownership to rival foundry TSMC and installing a new CEO -- changes that might suggest bigger changes ahead for both companies.

Pressure control for reduced microbubble formation

11/10/2009 

Microbubbles in leading-edge photoresist materials can distort the exposure pattern and affect yield, sometimes even if proper steps are taken. Entegris' Jennifer Braggin discusses results of a study in which positive pressure applied on the chemistry before the dispense nozzle reduces microbubbles in top anti-reflective coating (TARC).

Hitachi unit improves microhole-drilling processes for PCBs

11/05/2009 

Hitachi Via Mechanics says it has developed new processes for microhole drilling cast polyimide wafers and multilayered materials used in high density electronics packaging, that can produce ≤100μm-dia. holes in high-volume manufacturing.

Alchimer: Higher-AR TSV saves $700/wafer

11/04/2009 

A new study suggests that through-silicon vias (TSV) with higher aspect ratios (20:1 or 10:1, vs. 5:1) offer a significant payback by saving space on a die, up to $700 per wafer.

Targeting 22nm and beyond copper electroplating

11/02/2009 

Novellus VP/GM Sesha Varadarajan explains how the company's new Sabre Excel tool uses "state-of-the-art" millisecond control, dynamic current modulation, a low-corrosion electrolyte, and redesigned wafer handling to provide fill and defect density performance for the 22nm technology node.

Electroglas reforms around prober assets

10/27/2009 

A Delaware bankruptcy court has approved the sale of Electroglas' wafer probe assets, including name and trademarks, to private financial group EG Systems -- formed specifically for this purpose.

SMIC quals Microstaq MEMS chip for fluid control

10/26/2009 

Microstaq, a developer of silicon MEMS-based fluid control technology, has qualified its Ventilum MEMS-based chip at Semiconductor Manufacturing International Corp (SMIC), billed as both an advancement in electronic valve technology and a new facet to the Chinese foundry's MEMS capabilities.

DARPA project demos wafer-scale graphene-on-Si FETs

10/23/2009 

A DARPA-backed program to develop graphene-based RF circuits with "game-changing" potential for electronics systems has achieved a new milestone: development of graphene-on-silicon FETs at full wafer scale.

Leti touts planar SOI for LP 22nm

10/21/2009 

French R&D organization Leti says its work with SOI-based planar CMOS meets requirements for low-power (LP) 22nm node device requirements, e.g. consumer electronic devices such as 4G mobile phones.

SEMI: Wafer shipments to surge 23% in 2010

10/14/2009 

After a two-year slump, silicon wafer shipments to semiconductor makers are expected spike to new record levels within the next two years, according to new forecast data from SEMI.

M+W Zander picked to build GF's Fab2

10/13/2009 

GlobalFoundries has signed a &euro550M contract with M+W Zander to engineer and build its Fab 2 wafer facility in New York State.

UMC sales up, TSMC down in September

10/09/2009 

Top global foundries TSMC and UMC saw September sales go in different directions in September, but the market is bracing for what might be slower times in the near future.

iSuppl: Get ready for foundry mergers

10/09/2009 

Growth might be returning to the semiconductor industry, including the foundry sector -- but the landscape emerging from the horrid downturn is about to change dramatically, according to a recent analysis from iSuppli.

Wafer supplier IQE buys GaN materials firm

10/07/2009 

IQE plc has agreed to acquire UK compatriot NanoGaN, which offers processes and IP related to gallium nitride (GaN) materials and devices, in a deal worth up to £3.6M.

Another casualty: FormFactor snaps up Electroglas' motion-control biz

10/06/2009 

The deep downturn in the semiconductor industry has claimed another casualty -- Electroglas, following a recent bankruptcy filing, has auctioned off its motion control automation assets to FormFactor, and reportedly is poised to sell its prober biz for an unidentified bidder.

Current and future trends in vacuum process technology

10/05/2009 

Semiconductor, flat-panel display, solar manufacturing, and scientific instrumentation industries have driven recent developments in vacuum pumping technology and are likely to continue to do so. Edwards CTO Stephen Ormrod describes the future of vacuum technology and summarizes the design changes that will likely be needed.

Suss MicroTec banks on ATM in its new 3D probe station

09/28/2009 

Süss MicroTec's Stojan Kanev tells SST/AP about the company's new addition to its toolset for 3D integration: a probe station targeting 300mm wafer-level 3D stacked structures.

Inside the NIST gold/Si "sandwich" molecular switch

09/25/2009 

NIST materials scientist Mariona Coll Bau gives Small Times more insight into recent work with molecular switches and organic-silicon/metal "sandwiches," utilizing a flip-chip lamination process.

Wafer demand softening, bounceback in 2010

09/25/2009 

Silicon wafer demand bounced back significantly (79%) in 2Q09 thanks to inventory rebuilds, but will soften in 4Q with "moderate production cutbacks" before gradually upshifting to an expansion mode again, according to a Gartner analyst note.

SPIE/BACUS: NIL in patterned media...but when for ICs?

09/18/2009 

Reporting exclusively for SST, Toppan Photomasks' Franklin Kalk reviews papers from the SPIE/BACUS Symposium that mapped nanoimprint lithography's intersection with patterned hard-disk media, and discussed how to resolve the key technical issues that have prevented its traction in semiconductor manufacturing.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

Sponsored By:

Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

Sponsored By:

More Webcasts