Wafer Processing

WAFER PROCESSING ARTICLES



Imec, Lam Research improve wafer drying with test method

10/24/2011 

Imec and Lam Research have developed a quantitative evaluation method for wafer drying techniques. Silicon nano-pillar test structures with high aspect ratios (up to 28) demonstrate the mechanisms of pattern collapse and sticking in the wafer drying step.

Semiconductor tool orders slide below billion-dollar mark in September

10/21/2011 

Awaiting "stability in the overall economic outlook," semiconductor device makers spent 40.4% less with North America-based manufacturers of semiconductor equipment year-over-year in September 2011. The September book-to-bill ratio published by SEMI fell to 0.75.

Brewer Science, EVG commercialize temporary wafer bonding with zoning laws

10/20/2011 

Brewer Science Inc. and EV Group (EVG) will both commercialize ZoneBOND technology for temporary wafer bonding, thin wafer processing, and debonding applications.

Asian foundry selects Mattson RTP tool

10/19/2011 

Mattson Technology Inc. (NASDAQ: MTSN) won acceptance for its Helios XP rapid thermal processing (RTP) system for process of record from a major Asian foundry.

TSV electroplating dev team unites SVTC, Amerimade Technology, Shanghai Sinyang Semiconductor Materials

10/19/2011 

Nanotech accelerator SVTC Technologies, wet chem equipment maker Amerimade Technology, and chemicals company Shanghai Sinyang Semiconductor Materials will collaborate on electroplating processes for TSV that are production-ready for advanced packages and MEMS.

Writing an outsourcing spec that delivers

10/18/2011 

Once you've chosen an outsourcing partner, focus on the details. Mark Danna of Owens Design shares how to write a project specification that is adaptable and designed to bring a project in on time and on budget.

Wafer demand isn't spread evenly around device types

10/17/2011 

Demand for NAND devices will grow more than 20% in 2011, while DRAM demand will decline by more than 1%. Other trends? 45nm and smaller nodes are increasing market share, says Semico.

Air-cooled wafer probe chuck debuts in modular format

10/17/2011 

ERS uncrated the ERS AirCool 3 wafer thermal test system with modular options and easy integration into all major wafer prober systems.

Steam + gas subsystem targets film uniformity, better wafer cleaning, and PV fab steps

10/13/2011 

RASIRC debuted the Steamer Turbo for specialty applications in the semiconductor and photovoltaic industries, featuring integrated gas blending control.

SEMICON Europa 2011: Hopes for 2012 growth, no room for gloom

10/13/2011 

ATREG's Barnett Silver reports from SEMICON Europa, where the overall mood on the show floor is optimistic yet cautious, with hope for strong growth by mid-2012. Key themes include a slowdown in 200mm demand, an elite membership for 450mm, and keen interest in MEMS.

Edwards dry pump optimized for solar, FPD, semiconductor fab

10/12/2011 

Edwards Limited expanded its iXH harsh process dry pump family with the iXH500H series of 500m3/h pumps optimized for flat panel display (FPD), solar, and advanced semiconductor processes requiring high gas flows and flexible pump temperature profiles.

Flat silicon wafer shipments will pick up in 2012, 2013

10/12/2011 

While the market has currently softened, early-2011 momentum will carry the year's semiconductor silicon sales to a higher total than 2010, said Stanley T. Myers, president and CEO of SEMI, noting the figures are an industry record. Growth will continue at "modest levels" through 2013.

Imec, ASML extend litho work, debut EUV sensors

10/10/2011 

Imec and tool vendor ASML have signed a new 5-year deal to continue collaboration on lithography technologies, both immersion and EUV, as well as associated components -- including new sensors to help calibrate lens alignment and dose.

GlobalFoundries signs onto new A*STAR productivity enhancement program

10/07/2011 

Singapore has launched the Manufacturing Productivity Technology Centre at A*STAR's Singapore Institute of Manufacturing Technology. GlobalFoundries signed a 5-year Manufacturing Productivity Enhancement master plan agreement with SIMTech, working on materials recycling, wafer transport, and more.

Strong analog growth bucks semiconductor industry trend

10/06/2011 

Analog semiconductors will buck the trend of contraction in the overall chip industry, growing 13.8% in 2011, 8.6% in 2012, then 12.8% in 2013.

SPIE BACUS 2011: Having your cake and eating it too

10/05/2011 

Jan Willis from the eBeam Initiative summarizes the group's annual event at SPIE BACUS 2011, with presentations on both improving wafer quality and mask write times at the 20nm node. Other presentations dealt with EUV masks and a lack of funding support.

memsstar expands in Silicon Glen

10/04/2011 

The maturing MEMS market and increased adoption of secondary equipment for semiconductor manufacturing have led deposition and etch tool supplier memsstar Limited to expand in Livingston, Scotland. memsstar added new positions in logistics, administration, and skilled and semi-skilled engineering to its jobs roster in conjunction with the expansion.

Fab-lite business model called "sustainable," attracts converts

10/04/2011 

The fab-lite (or asset-lite) trend in IC industry has spread quickly and caused a good deal of debate about the future of chip making, says IC Insights in its latest research bulletin from The McClean Report. Fab-lite integrated device manufacturers (IDMs) from the US and Europe are now joined by large Japanese IC makers -- Toshiba, Renesas, Sony, and Fujitsu -- increasing utilization of third-party foundries.

How to qualify your outsource selection before you write the check

10/03/2011 

Mark Danna, Owens Design, continues his series on the right way to outsource a project. Take these 3 steps before deciding on an outsourcing partner: Check references, consult your professional network, and do some online research.

FSI ORION single-wafer clean tool ordered for Asian foundry

10/03/2011 

FSI International (Nasdaq:FSII) will ship an ORION single wafer cleaning system to a leading Asian semiconductor foundry for 28nm FEOL cleaning.




WEBCASTS



Environment, Safety & Health

Date and time TBD

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

Sponsored By:

Wafer Processing

Date and time TBD

As the industry moves to 10nm and 7nm nodes, advances in wafer processing – etch, deposition, planarization, implant, cleaning, annealing, epitaxy among others – will be required. Manufacturers are looking for new solutions for sustained strain engineering, FinFETs, FDSOI and multi-gate technologies, 3D NAND, and high mobility transistors.

Sponsored By:

More Webcasts