SEMICON West '00—July 14, 2000—Silicon Valley Group (SVG) has introduced Xcelerate, a rapid thermal furnace designed for ion implant activation anneals where higher anneal temperatures activate more of the dopant while maintaining thermal budget requirements.
By Stephanie J. Levy
SEMICON West '00—July 12, 2000—Credence Systems Corporation will demonstrate its new Kalos XW and Quartet One XL memory product lines, as well as its VS 2000 testing system in San Francisco, Calif.
By Stephanie J. Levy
SEMICON West '00—July 14, 2000—The Specialty Materials division of 3M showcased its new enviro-friendly gas and fluid products in San Francisco, Calif. this week. The two products shown were a perfluorocarbon (PFC) gas used to clean semiconductor chambers named 3M Specialty Gas PFG-3480, and a dielectric fluid used in heat transfer applications named HFE-7500.
By Stephanie J. Levy
By pennNET Staff
SEMICON West ’00—July 14, 2000—In San Jose, Calif., Aetrium Incorporated demonstrated its new dynamic temperature IC test handler and its new series of small component IC test handlers.
The Model DTX utilizes dynamic conducive temperature control for high-volume production IC test handling applications. It can be configured in single or multiple test sites ranging up to 64 sites, say officials with the St. Paul, Minn.-based company.
Unlike conventional test handler designs, which use a chamber to thermally condition ICs before and during test, the Aetrium DTX uses proprietary conductive thermal technology to monitor and control the temperature of each IC under test, say company officials. This design allows the user to test devices dissipating up to 100 watts/cm2 while maintaining the device under test temperature set point within +2°C at the test site, they say.
The Model 8832 Small Component Integrated Test Handler is designed for high volume production test of SOT, TO, micro lead frame, SON and QFN device type packages. The product is a member of the company’s SC Series and accepts devices in bulk format with a turret-based handling process. The Model 8832 is capable of operating at rates of up to 20,000 units per hour. It also offers the option of multi-site testing and integrates other processes such as laser marking, lead and mark inspections and multiple tape and reel outputs, say company representatives.
By pennNET Staff
By pennNET Staff
SEMICON West ’00—July 14, 2000—In San Jose, Calif., Aetrium Incorporated demonstrated its new dynamic temperature IC test handler and its new series of small component IC test handlers.
The Model DTX utilizes dynamic conducive temperature control for high-volume production IC test handling applications. It can be configured in single or multiple test sites ranging up to 64 sites, say officials with the St. Paul, Minn.-based company.
Unlike conventional test handler designs, which use a chamber to thermally condition ICs before and during test, the Aetrium DTX uses proprietary conductive thermal technology to monitor and control the temperature of each IC under test, say company officials. This design allows the user to test devices dissipating up to 100 watts/cm2 while maintaining the device under test temperature set point within +2°C at the test site, they say.
The Model 8832 Small Component Integrated Test Handler is designed for high volume production test of SOT, TO, micro lead frame, SON and QFN device type packages. The product is a member of the company’s SC Series and accepts devices in bulk format with a turret-based handling process. The Model 8832 is capable of operating at rates of up to 20,000 units per hour. It also offers the option of multi-site testing and integrates other processes such as laser marking, lead and mark inspections and multiple tape and reel outputs, say company representatives.
By pennNET staff
SEMICON West ’00—July 13, 2000—In San Jose, Calif., Ion Systems introduced a ceiling emitter featuring optional e-Diagnostics capability for remote monitoring. The product is equipped with the company’s digital iCON technology, an interactive communications platform for electrostatics management.
The Model 5511 is the latest addition to the company’s 5500 series. It features individual emitter addressability for controlling operating parameters not only at the emitter, but also at the controller, according to Ion officials. The tool meets operation requirements for a Class 1 cleanroom environment and permits precise adjustments to the ionizer balance without disrupting laminar airflow, they say.
By pennNET Staff
By pennNET staff
SEMICON West ’00—July 13, 2000—In San Jose, Calif., Ion Systems introduced a ceiling emitter featuring optional e-Diagnostics capability for remote monitoring. The product is equipped with the company’s digital iCON technology, an interactive communications platform for electrostatics management.
The Model 5511 is the latest addition to the company’s 5500 series. It features individual emitter addressability for controlling operating parameters not only at the emitter, but also at the controller, according to Ion officials. The tool meets operation requirements for a Class 1 cleanroom environment and permits precise adjustments to the ionizer balance without disrupting laminar airflow, they say.
SEMICON West '00—July 12, 2000—In San Jose, Cal., today, Teradyne Inc. introduced a VLSI test system that the company says will allow a full range of test capability without requiring hardware changes or system upgrades.
By Jason Rothman
SEMICON West ’00—July 14,2000—Semitool’s Paragon line of electrochemical deposition tools will include Royal Phillips Electronics new integrated metal-film metrology system, say the companies.
The collaboration arose to address the industry’s need for tools guaranteed to operate well together, eliminating one issue facing customers moving to 300mm. “Semitool has come up with a proprietary process to repair the seed layer before they put the ECD plating over it,” says Bill Gately, General Manager for Phillips Analytical in Boston. “In order to properly do that they need [metrology] within their tool to measure the seed layer when it comes into the tool so they know first whether it needs to be repaired and second how it needs to be repaired,” he says.
He added that Phillips already works with Novellus and Applied Materials and that Phillips suggested a stand-alone box to measure the wafers. Semitool suggested combining the two tools to simplify the process.
The new combined system first measures the seed layer of incoming wafers. It shoots a nanosecond laser pulse onto the wafer’s coating, creating an acoustic wave that moves across the wafer like throwing a stone into water, according to Dr. Tom Ryan, a Product Marketing Manager for Phillips. Then a probe laser measures the wave’s velocity. A computer then reads the information and a robot arm takes the wafer either to the ECD plating stage or it sends it back to repair the seed layer.
“We would like to become the standard metrology that can be utilized as a common link to all these processes,” Gately said. “We view this as a first step in a strategic direction we are heading in,” he says.
SEMICON West '00—July 12, 2000—SABER (Schlumberger Advanced Business Engineering Resources), a unit of the Test & Transactions business segment of Schlumberger, has launched a new outsourcing service to aid customers with the design and lauch of new test cells.
By pennNET Staff
SEMICON West '00—July 12, 2000—Boxer Cross unveiled a new metrology solution today in San Francisco, Calif. at the company's private exhibit at Zeum, the new art and technology center.
By Stephanie J. Levy