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IFTLE 95 3DIC – Time Flies When You’re Having Fun; Further Details on the Micron HMC , Equipment Suppliers Continue Consolidation, EVG Temp Adhesive Open Platform

Time Flies When You’re Having Fun with 3DIC

Seems like yesterday that the packaging world was hearing that Fujitsu, Toshiba, NEC, Oki, Renesas and others had formed a pre-competative consortium under the Association of Super Advanced Electronics Technologies  to study direct connecting of chips with through silicon vias (TSV). It seems like yesterday but it was 1999, 13 years ago.  

In Feb 2005 my first article on the topic “Future IC’s Going Vertical” was published in Semiconductor International predicting that the industry would eventually have to move in this direction. A short month later, March 2005 I felt like a prophet when a TSV based 3D stacking approach was described by Intel’s Justin Rattner (todays CTO) at the Spring Developer Forum, with statements like “…stacked wafers and stacked dies using thru-silicon vias are showing promise in meeting the memory bandwidth challenge.”

A year later, in April 2006 headlines from Soeul read “… Samsung has developed a new "3D" package, which reduces space requirements and increases performance capabilities of today’s multi-chip packages. The company plans to use the technology to improve its NAND Flash packaging starting in 2007Samsung announced that its new wafer-level processed stack package (WSP) rather than using wire-bonding …. micron-sized holes that penetrate through the silicon vertically to connect circuits directly – TSV. According to Samsung the technology would enable manufacturers of mobile and consumer electronics devices to achieve better electrical performance and design slimmer and high-performance handset designs that provide improved battery time. The announced that the technology would enter mass production in 2007, for NAND Flash packages initially. And that they planned to use WSP for server DRAM stack packages sometime down the road.

A year later, in April of 2007, the headlines were “ IBM has announced that they’re relatively close to going commercial with a "through silicon via" (TSV) technology that will enable them to create high-bandwidth connections between two or more chips in a stacked packaging format." The big news about IBM’s design is that the company intends to start shipping product samples based on this technology in the second half of this year, with full production coming in 2008. "Looks as if TSV will be here faster than anyone previously thought."

Now, thirteen years later ASET is in its 3rd incarnation “the Dream Chip program” , it is obvious that DRAM will be stacked before NAND flash hopefully in HVM by 2013 (not 2007) , IBM has announced a major memory program with Micron (though not in 2008) and we are still awaiting any word of commercialization from Intel. Certainly it’s fair to say that this is taking a bit longer than we all thought, even those of us who were trying to be ultra conservative.

Micon / IBM  HMC – further details

IFTLE has been sent a few messages asking for further details on the Hybrid memory cube production.

Micron has announced that they will be manufacturing the memory layers and have contracted with IBM to manufacture the logic layer. Micron will be doing the assembly of the layers at a yet to be disclosed location. For now we can assume they are doing the initial production in Boise. For our initial discussions on this technology see IFTLE 74, “The Micron Memory Cube consortium”.

The technology described by M. G. Farooq of IBM last December at the IEEE IEDM [ see IFTLE 82 “3DIC at the 2011 IEDM…”] is the technology being used to create the logic layer in the HMC stack (blue layer).

(Click on any of the pictures to enlarge them)

As noted in IFTLE 82, TSVs are integrated at “fatwire” (upper level metal) levels to optimize wire-ability and process complexity with 4 to 12 metal levels including low-k interlevel dielectric (ILD). TSV of less than 100 µm depth were etched with near vertical sidewalls at a minimum pitch of 50 µm. An example of this is shown below. It is believed that the Micron logic layers  are being done in SOI technology.
The logic layer for the HMC parts will be manufactured at IBM’s advanced semiconductor fab in East Fishkill, N.Y., using the company’s 32nm, high-K metal gate process technology [link]


Chipworks has concluded that “ it appears that the TSVs are annular. Once the lower metal / dielectric stack is formed (including the via dielectric for the metal layer that contacts the TSVs), the TSVs are drilled through to the silicon, and then a Bosch etch is used to drill the vias about 100 µm into the substrate, with a minimum pitch of 50 µm. After drilling, a conformal oxide is deposited, the barrier and seed layers are sputtered in, the copper fill is plated in, and any excess copper is CMP’d off. The dielectric for the contact level metal is put down, and then the top fat-wire metal levels are conventionally defined.” [link]

TEL acquires Nexx

Tokyo Electron Limited (TEL) has acquired semiconductor packaging equipment supplier NEXX. Nexx advanced deposition equipment, including electrochemical deposition (ECD) and physical vapor deposition (PVD) tools will be added to the TEL line of products aimed at back end packaging applications and 3DIC.


Long time readers know that this has been a theme identified by IFTLE [ see PFTLE 41, “ 3D Integration Stays Hot at Semicon West” or PFTLE 107 "3D News:Applied/Semitool, TSMC, Ziptronix”


Looks a lot like the front end heavy weights Applied, LAM and TEL are going to buy up all the pieces they need to become the 3 heavyweights in packaging and 3D. Consolidation will continue because with fewer and fewer players moving to 22 nm and beyond packaging is a natural evolution for some of these big front end equipment vendors.

Shin-Etsu Joins EVG Temp Adhesives open platform
Shin-Etsu’s adhesives will be entering qualification trials on EVG’s EZR (Edge Zone Release) and EZD (Edge Zone Debond) modules, which support the new ZoneBOND room temperature debonding process. Shin-Etsu is the first participant to announce for the program since its inception late last fall [ see IFTLE 76, “ Adv Pkging at IMAPS 2011: recent 3D Announcements”.
EVG’s ZoneBOND temporary bond / debond  solutions and open materials platform include:  the use of silicon, glass and other carriers; compatibility with existing, field-proven adhesive platforms; and the ability to debond at room temperature with virtually no vertical force being applied to the device wafer.  To support grinding and backside processing at high temperatures and to allow for low-force carrier separation, the concept defines two distinctive zones on the carrier wafer surface with strong adhesion in the perimeter (edge zone) and minimal adhesion in the center zone.  For further description of the technology see IFTLE 90 "Highlights from the IEEE 3DIC 2012 Japan" and refs therein.  
For all the latest on 3DIC and advanced packaging stay linked to IFTLE………………

Time Flies When Your Having Fun

Time Flies When Your Having Fun with 3DIC

Seems like yesterday that the packaging world was hearing that Fujitsu, Toshiba, NEC, Oki, Renesas and others had formed a pre-competative consortium under the Association of Super Advanced Electronics Technologies  to study direct connecting of chips with through silicon vias (TSV). It seems like yesterday but it was 1999, 13 years ago.  

In Feb 2005 my first article on the topic “Future IC’s Going Vertical” was published in Semiconductor International predicting that the industry would eventually have to move in this direction. A short month later, March 2005 I felt like a prophet when a TSV based 3D stacking approach was described by Intel’s Justin Rattner (todays CTO) at the Spring Developer Forum, with statements like “???????.. stacked wafers and stacked dies using thru-silicon vias are showing promise in meeting the memory bandwidth challenge.”

A year later, in April 2006 headlines from Soeul read “..  Samsung has developed a new "3D" package, which reduces space requirements and increases performance capabilities of today’s multi-chip packages. The company plans to use the technology to improve its NAND Flash packaging starting in 2007Samsung announced that its new wafer-level processed stack package (WSP) rather than using wire-bonding …. micron-sized holes that penetrate through the silicon vertically to connect circuits directly – TSV. According to Samsung the technology would enable manufacturers of mobile and consumer electronics devices to achieve better electrical performance and design slimmer and high-performance handset designs that provide improved battery time. The announced that the technology would enter mass production in 2007, for NAND Flash packages initially. And that they planned to use WSP for server DRAM stack packages sometime down the road.

A year later, in April of 2007, the headlines were “ IBM has announced that they’re relatively close to going commercial with a "through silicon via" (TSV) technology that will enable them to create high-bandwidth connections between two or more chips in a stacked packaging format." The big news about IBM’s design is that the company intends to start shipping product samples based on this technology in the second half of this year, with full production coming in 2008. "Looks as if TSV will be here faster than anyone previously thought."

Now, thirteen years later ASET is in its 3rd incarnation “the Dream Chip program” , it is obvious that DRAM will be stacked before NAND flash hopefully in HVM by 2013 (not 2007) , IBM has announced a major memory program with Micron (though not in 2008) and we are still awaiting any word of commercialization from Intel. Certainly it’s fair to say that this is taking a bit longer than we all thought, even those of us who were trying to be ultra conservative.

Micon / IBM  HMC – further details

IFTLE has been sent a few messages asking for further details on the Hybrid memory cube production.

Micron has announced that they will be manufacturing the memory layers and have contracted with IBM to manufacture the logic layer. Micron will be doing the assembly of the layers at a yet to be disclosed location. For now we can assume they are doing the initial production in Boise. For our initial discussions on this technology see IFTLE 74, “The Micron Memory Cube consortium”.

The technology described by M. G. Farooq of IBM last December at the IEEE IEDM [ see IFTLE 82 “3DIC at the 2011 IEDM???????”] is the technology being used to create the logic layer in the HMC stack (blue layer).

As noted in IFTLE 82, TSVs are integrated at “fatwire” (upper level metal) levels to optimize wire-ability and process complexity with 4 to 12 metal levels including low-k interlevel dielectric (ILD). TSV of < 100 µm depth were etched with near vertical sidewalls at a minimum pitch of 50 µm. An example of this is shown below. It is believed that the Micron logic layers  are being done in SOI technology.

The logic layer for the HMC parts will be manufactured at IBM’s advanced semiconductor fab in East Fishkill, N.Y., using the company’s 32nm, high-K metal gate process technology [link]
Chipworks has concluded that  “ it appears that the TSVs are annular. Once the lower metal/dielectric stack is formed (including the via dielectric for the metal layer that contacts the TSVs), the TSVs are drilled through to the silicon, and then a Bosch etch is used to drill the vias about 100 µm into the substrate, with a minimum pitch of 50 µm. After drilling, a conformal oxide is deposited, the barrier and seed layers are sputtered in, the copper fill is plated in, and any excess copper is CMP’d off. The dielectric for the contact level metal is put down, and then the top fat-wire metal levels are conventionally defined.” [link]
TEL acquires Nexx
Tokyo Electron Limited (TEL) has acquired semiconductor packaging equipment supplier NEXX.  Nexx advanced deposition equipment, including electrochemical deposition (ECD) and physical vapor deposition (PVD) tools will be added to the TEL line of products aimed at back end packaging applications and 3DIC.
Long time readers know that this has been a theme identified by IFTLE [ see PFTLE 41, “ 3D Integration Stays Hot at Semicon West” or PFTLE 107 "3D News:Applied/Semitool, TSMC, Ziptronix”

Looks a lot like the front end heavy weights Applied, LAM and TEL are going to buy up all the pieces they need to become the 3 heavyweights in packaging and 3D. Consolidation will continue because with fewer and fewer players moving to 22 nm and beyond packaging is a natural evolution for some of these big front end equipment vendors.
???

Shin-Etsu Joins EVG Temp Adhesives open platform
Shin-Etsu’s adhesives will be entering qualification trials on EVG’s EZR® (Edge Zone Release) and EZD® (Edge Zone Debond) modules, which support the new ZoneBOND??????? room temperature debonding process. Shin-Etsu is the first participant to announce for the program since its inception late last fall [ see IFTLE 76, “ Adv Pkging at IMAPS 2011: recent 3D Announcements”.
EVG’s ZoneBOND temporary bond / debond  solutions and open materials platform include:  the use of silicon, glass and other carriers; compatibility with existing, field-proven adhesive platforms; and the ability to debond at room temperature with virtually no vertical force being applied to the device wafer.  To support grinding and backside processing at high temperatures and to allow for low-force carrier separation, the concept defines two distinctive zones on the carrier wafer surface with strong adhesion in the perimeter (edge zone) and minimal adhesion in the center zone.  For further description of the technology see IFTLE 90 "Highlights from the IEEE 3DIC 2012 Japan" and refs therein.  

For all the latest on 3DIC and advanced packaging stay linked to IFTLE???????????????????????????????????..

Experts Discuss Interposer Infrastrucrure at IMAPS Conference

IFTLE brought together a  panel of manufacturers, users and market specialists at the 2012 IMAPS Device Packaging Conference in Fort McDowell AZ to discuss the Evolving 2.5D / 3D Infrastructure. [ Douglas Yu, Sr Director of front end and back end technology development for TSMC; Jonathon Greenwood, Director of Packaging R and D at GlobalFoundries;  Remi Yu, Deputy Division Director of UMC]memory suppliers [Nick Kim, VP of future electronic packaging technologies at Hynix] assembly houses [ Rich Rice, Sr VP of sales for ASE and Ron Huemoeller, VP of Advanced 3D interconnect at Amkor] users [Matt Nowak, Sr Director of Engineering at Qualcomm] and Market specialists [ Jan Vardaman, President of TechSearch Inc].

(Click on any of the images below to enlarge them)

       [l to r] Doug Yu [TSMC], Garrou [IFTLE],Huemoeller [Amkor], Vardaman [TechSearch],
Greenwood [GlobalFoundries], Yu [UMC], Kim [Hynix], Nowak [Qualcomm], Rice [ASE]
When asked whether 2.5/ 3D TSV technology has been narrowed down to copper TSV middle from IDM or foundries and some vias last backside all the panelists agreed with this conclusion. When asked about standard TSV dimensions, the foundry and OSAT representatives all agreed that 5-8 µm  on 50 µm thick Si looks like it has become the standardized offering that many of their customers are expressing interest in. When it came to interposers, they similarly all gave the nod to 100 µm thick interposers with ~ 10 um diameter TSV. 
Sourcing Interposers
A significant portion of the panels time was spent discussing current and future interposer sourcing. Assuming the attributes of “fine”vs “coarse” interposers as defined in the table below, the question becomes “where will these interposers be coming from” and “what will they be used for” ? 
So far announcements from Xilinx and Semtech indicate that they will both be using “fine pitch” interposers i.e fabricated by ~65 nm dual damascene [DD] CMOS processing by TSMC and IBM respectively. Altera and Nvida have also announced similar high density interposers for future use as have other graphics chip makers.
While all the OSATs have RDL technology capable of fabricating “coarse” interposers so far none of the major players [ ASE, Amkor, SCP, SPIL] have announced that they are entering the interposer business.
While all of the current roadmaps point to 2012-2014 as being the date for initiation of mass production for 2.5/3D products one must now ask where is the interposer production to meet this demand. If these lines are not in place now, is it easonable to think that products using them be qualified and in mass production within the next 24 months ?
During his conference presentation Amkors Huemoeller indicated that they would not be manufacturing interposers and their search of the industry for sources  indicated that only 3 players were close to being ready to deliver interposers that wee useful to Amkor, namely TSMC, UMC and GlobalFoundries.
 While glass panels and even possibly advanced laminates presented interesting possibilities for low cost future products, Amkor’s perspective is that  they are in the earliest stages of R&D.
All 3 of the foundry panelists indicated that they will be commercializing fine featured interposers although as we stated only TSMC and IBM had announced small volume product production has been initiated.
When asked about rumors circulating that OSATS are looking to put equipment in place to manufacture DD “fine pitch“ interposers, both Amkor and ASE indicated that they had no plans to do so.
IFTLE concludes that despite significant “industry chatter” the only programs that can afford interposers, so far, are programs that require the density or other attributes provided by fine featured interposers which can only be provided today by foundries /3D active IDMs. While we can anticipate that there might be products in the future that can be designed to take advantage of “coarse” interposers, and some of the initial fine interposer activities such as memory + logic + graphics chip applications might be able to migrate to coarse interposers as they become available, we will, initially at least, be limited by the availability and cost of foundry supplied interposers. 
The Evolving Infrastructure
TSMC reconfirmed  that they will provide full 2.5 / 3D service including chip design and fabrication, stacking and packaging [ see “2.5D announcements at the Global Interposer Techconferenceand “TSMC repeats call for foundry-centric 2.5/3D industry” ]
TSMCs Yu indicated that they have made their thoughts clear in the past few months and it can be found clearly delineated on their web page. During his plenary lecture Yu once again indicated that fabrication of chips on interposers was not as easy as making prototypes makes it look and they strongly favored controlling and being responsible for the full process.
When asked about supplying memory needs, Yu indicated that they would also handle that by having partnerships in place to supply the required memory although these partners were not identified.
When asked for their positions, UMC and Global Foundries indicated a preference to work under the open ecosystem model where chips from various vendors could be stacked and assembled by OSAT partners.
When asked how the current economic issues surrounding Elpida was affecting the UMC/Elpida/PTI partnership, UMCs Remi Yu responded that this was only one engagement that they had in place for 2.5/3D and that they were moving forward with others.
Amkor’s Huemoeller indicated that foundries would be supplying interposers and they [ the OSATS] would be assembling them.
 ASE agreed short term but indicated that longer term they envisioned a broad “pie” with space for several types of players. ASE envisions future applications where coarse interposers would find their niche and be an important part of the technology base
Both of the OSATS, as would be expected, favored the open ecosystem model where chips from various suppliers would be assembled at the OSATS. 
Qualcomm reiterated a position that they have expressed in the past which is that interposers would add substantial cost to 3D stacking and as such probably would not be a broadly accepted solution for low cost mobile products
TSMCs Yu responded that indeed the addition of an interposer added cost to  the overall component, but that “…this [2.5D] solution also offers cost savings by reuse of IP and separating digital and analog circuitry and allowing partitioning of costly SoC “ and that this in fact could make it the lowest cost solution..
When Hynix was asked whether they would be offering memory stacks containing TSV as have been already announced by Samsung, Micron and Elpida Hynix Kim responded that he expects “2 and 4 chip memory stacks with TSV to be in mass production in 2013”
When the panel was asked with the wide IO memory standard is now in place. what other standards were needed quickly Nowak of Qualcomm indicated that the upcoming Semi handling and transport standards were needed and noted that standardization was also needed in the ESD area and  standardization in the “design exchange formats” where he feels Si2 is taking the lead.
When asked for their opinion on the current status of design tools all 3 of the foundries indicated that current design tools are adequate to move forward. Qualcomm’s Nowak offered that logic on logic design tools were still lacking.
In terms of test strategies UMC would like to see some better standardization in the test area while Yu of TSMC drew a chuckle from the crowd when he noted that test needed to be minimized. Similarly, on the assembly front Rice indicated that ASE is having to test “everything” till the yields are up and Amkor quickly concurred.
Focusing on the first generation of 2.5/3D  stacking interconnect all accepted that this will be done with Cu/Sn eutectic by reflow or thermo-compression bonding.   When asked what was limiting direct Cu-Cu bonding all agreed that copper bonding was not ready for prime time just yet. Yu a strong proponent of copper interconnect, noted that current copper bonding options have yield issues that have not yet been overcome “current requirements for pads are too large and the required CMP of the interfaces is causing dishing that must be handled…HVM of copper –copper bonding options is tougher than showing research samples”
When similarly asked about  hybrid metal/oxide bonding schemes where oxide / copper surfaces are polished flat, oxide bonded then subsequently oven annealed to strengthen oxide bond and form Cu-Cu bonds (as shown by Ziptronix and Leti) no panel members were willing to say that this technology was close to commercialization.  TSMC responded that these technologies required very flat surfaces which were difficult to obtain due to dishing and other issues and that in general such technologies were “not ready right now”.  ASE expanded that this option was not required to solve todays problems and therefore was being looked at as a interesting R and D solution which could find its niche later. During Q and A Cook of Ziptronix offered that she thought their technology was ready and simply awaiting the commitment of a significant player. When the panel questioned copper migration issues due to miss alignment of the Cu-Cu bonds, Cook offered that their process which encapsulates the copper pillars in nitride barrier. 
Rumors abound that TSMC is designing the apple A6 processor for ipad and iphone with 3D TSV. When asked to comment on this or whether Samsung was also offering TSV in their design of the A6 this question brought the expected “no comment” from TSMCs Yu and silence from the rest of the panel. Similarly no one would offer up comment about who would be supplying Sony who announced that they would require TSV interposers for their next Playstation upgrade.
When asked about timing for the expected HVM of wide IO memory stacks for tablets, Qualcomm responded probably 2013 and Hynix responded maybe 2015.

For all the latest in 3DIC and advanced packaging stay linked to IFTLE…………….

IFTLE 93 2.5 / 3D at the 2012 IEEE ISSCC

There were several interesting 2.5 / 3D presentations at the recent IEEE ISSCC conference.

2.5D Integrated Voltage Regulator Using Magnetic Core Inductors on Silicon Interposer

Minimizing energy consumption is a performance goal of all of today’s devices including  microprocessors. Dynamic voltage and frequency scaling (DVFS) is a technique for performing “on-the-fly” energy-use optimization. Implementation of DVFS requires voltage regulators that can provide independent power supplies and can transition power supply levels on nanosecond timescales, which is not possible with modern board-level voltage regulator modules (VRMs).

Switched-inductor integrated voltage regulators (IVRs) can enable effective implementation of DVFS, but the primary obstacle facing development of IVRs is integration of power inductors. This work by Columbia University and IBM presents “an early prototype switched-inductor IVR using 2.5D chip stacking for inductor integration” by  combining magnetic materials, chip-stacking design and a 2.5D chip packaging process. The power converters integrated onto the same chip, or into the same package, as microprocessors "significantly improves computational performance per watt of power consumed

They report that the technology can reduce power consumption, by 10-20% in a typical US data center

Inductors are fabricated on the silicon interposer in an elongated spiral with a Ni-Fe magnetic core encasing the copper windings on the long axis.  “The Ni-Fe is deposited under a magnetic biasing field so that the hard axis of magnetization forms along the width of the core as shown in the figure. Inverse coupling between adjacent inductors, is utilized to avoid magnetic saturation of the core.” The inductor fabrication involves successive electroplating deposition of the bottom magnetic core, copper windings, and top magnetic core. The windings are electrically isolated from the bottom magnetic core with a layer of silicon nitride, and from the top core with ”hard baked photoresist”.

(Click on any of the images below to enlarge them.)

IBM Stacked Memory on Processor

There have been rumors out there that IBM would be applying with their 3D technology in their upcoming Power7 devices. Their presentation at ISSCC may be the first look that we are getting at their early designs for processors stacked with cache memory using TSV technology.

This work describes a prototype 3D system, constructed by stacking a eDRAM memory layer and logic blocks from the IBM Power7TM processor L3 cache, and a “processor proxy” layer in 45nm CMOS technology enhanced to include TSVs. The 3D stack is constructed using 50 µm pitch C4’s joining the front side of the thick processor chip to TSV connections on the back side of a thinned memory. The TSVs are Cu-filled vias that are ~20µm dia and <100 µm deep.

Standard design methodologies with some 3D extensions were used to design each stratum. TSV locations for power and clock were pre-defined to match a regular grid. Some sites were de-populated to accommodate the eDRAM blocks.

Tezzaron Technology Used for 2 Processors

Old friend Bob Patti at Tezzaron was involved helping fabricate two of the processor modules shown at this years ISSCC

Georgia Techs  3D-MAPS: 3D massively parallel processor with stacked memory

3D-MAPS (3D Massively Parallel Processor with Stacked Memory) is a two-tier 3D IC, where the logic die consists of 64 general-purpose processor cores running at 277MHz, and the memory die contains 256KB SRAM (see Fig. 10.6.1). Fabrication is done using 130nm GlobalFoundries device technology and Tezzaron TSV and bonding technology. Packaging is done by Amkor. This processor contains 33M transistors, 50K TSVs, and 50K face-to-face connections in 5 x 5mm2 footprint. The chip runs at 1.5V and consumes up to 4W, resulting in 16W/cm2 power density

Tezzaron 3D technology was used to stack two logic dies using face-to-face (F2F) bonding, where the top die is thinned to 12µm and the bottom die is 765µm thick.  These F2F pads are used for signal and P/G connections between the two dies. The diameter of a F2F bonding pad is 3.4µm, and their pitch is 5µm. 3D-MAPS uses 235 I/O cells that are placed along the periphery of the core die. Each I/O cell contains 204 redundant TSVs, where each TSV connects between a metal 1 landing pad and a backside metal landing pad deposited on the backside of the silicon substrate. Each backside metal landing pad (56 x 56µm2) is wire bonded to the packaging substrate. The diameter, height, and pitch of a TSV are 1.2µm, 6µm, and 5µm, respectively

University of Michigan Centip3De

David Fick of the University of Michigan showed Centip3De another processor fabbed by Tezzaron. A 3-D IC stack using 128 ARM Cortex M3 cores and 256 Mbytes of stacked DRAM operating at near threshold voltage. The module has an un-thinned cache layer and a thinned core layer with WB connecting to TSV on the backside.

Hynix Dealing with Process Variation in a 3D Memory Stack

In general, commercial DRAM shows large process variation from chip to chip, which causes address access time variation (tAC).  In order to reduce the tAC variation, most high speed SDRAMs adopt a delay-locked loop (DLL) at the cost of additional area and power consumption.   
Hynix in their paper entitled “A 283.2µW 800Mb/s/pin DLL-Based Data Self-Aligner for Through-Silicon Via (TSV) Interface explains that this can be an even larger problem for stacked memory die. “For TSV-based stacked dies, large tAC variation results in higher power consumption due to short circuit current from data conflicts among shared IOs”. Since the number of IO  might be 512 or more for wide IO DRAM,  the additional power consumption can be very high. While it is desirable in mobile DRAM to exclude the DLL because of the power cost , TSV stacked DRAM for high-speed operation partially adopts a DLL in the master die (driver circuitry) . The DLL-based data self-aligner (DBDA) described by Hynix  reportedly reduces the data conflict time among stacked dies, consuming 283.2µW during read operation at 800Mb/s/pin. It dissipates 4.98µW in self-refresh mode with the help of leakage-current-reduction controller.

For all the latest in 3DIC and advanced packaging stay linked to IFTLE…………..

InterNepcon, Loss of a Dear Friend

At the recent InterNepcon Japan Exposition held at the Tokyo "big site" their "IC Packaging Technology Expo" contained some new information and some retreads that we have seen on IFTLE previously. Below I’ll cover a few new items that may be of interest to you.

TI’s Mark Gerber, a key player in bringing up their Cu pillar technology at Amkor addressed 3D packaging technology for next generation devices. Mark broke out current FC interconnect technologies into the following 4 categories indicating that fine pitch gold stud bumping was confined mainly to Japan.

(Click on any of the images below to enlarge them)

Sung-Il Cho of Samsung’s test and package center looked at Samsung’s Packaging Roadmap. He offered the following categorization for their DRAM, Flash and system LSI chips…

…and the following roadmap for flash technology development for solid state drives. Consistent with their corporate policy of holding new technology information "close to the vest" their inputs on 3D packaging with TSV were either ITRS roadmap slides or Yole roadmaps that have been published on these IFTLE pages before.

Keiichirou Kata of Renesas Advanced Package Development Dept. addresses their packaging roadmaps. He sees the major developing areas as FC BGAs, WLP and what he calls 3D Jisso (3D IC integration). Their FC technology roadmap is driven by desire for tighter pitches.

28 nm node chips will see a move to 108 um pitch and copper pillar bumps by the end of 2012.

Their proposed fan out WLP is an RDL first technology which they contend eliminates the issues of chip movement due to mold compound shrinkage.

They are moving to wide IO DRAM standards for low power DDR3 and beyond.

Ryoji Matsushima from Toshiba’s Memory Packaging Engineering Dept. discussed equipment materials and processing issues for thin memory packages. High memory capacity, high memory access speed and thinner packages all point towards memory stacking with TSV.

Technical issues with thin packages are shown on the slide below.

In Memorium: Jackki Morris Joyner

This past week I was attending the IMAPS Device Packaging Conference in Ft McDowell AZ (coverage coming in a few weeks). Those of you who are long time readers of IFTLE know I am there every year and strongly support this IMAPS conference. In the end, what separates societies is people not content. Part of what makes IMAPS great to work with has been Jackki Morris, or as we knew her post marriage Jackie Morris Joyner. When she first told us of the impending marriage and that she was becoming Jackki Joyner we all teased her asking her to run around the buildng for us ( for our non US friends this is the name of a famous US Olympic runner) and she laughed along with us. Jackki was the kind of person who made your life better for having talked to her on the phone or corresponded by email. Everyone asks "how’s it going" but she meant it. She genuinely cared about people… you just could tell.

The last time I talked with Jackki she was working the IMAPS table with her husband Cliff Monday night. When she saw me she gave me a hug and she turned on her computer and showed me pictures I had sent her of my grandaughters a few years ago. She had pages and pages of pictures of all the friends she had made through IMAPS because she just was that way. We shared funny stories of past conferences and laughed before I let her get back to work.

The next morning she was noticeably missing and Exec Dir Michael O’Donoghue revealed to several of us that Jackki had become quite ill during the night. By the time she made the hospital her heart had stopped several times and she was in intensive care with Cliff by her side. This cast a pall over the rest of the meeting and she remained in intensive are as we all left the meeting to go home. By the time I arrived home Friday she had passed away. The world is truly worse off today because this caring, loving person is gone.

Our prayers are with Cliff and her family

Anybody here seen my old friend Jackki
Can you tell me where she’s gone
She cared and shared with a lot of people
But it seems the good they die young
I just turned around and she’s gone

IFTLE 91 IEEE 3DIC Japan 2012 part 2

Continuing to examine presentations from the 3rd Int IEEE 3DIC Conf held in Japan in Feb 2012.

Copper Protrusion

In the last several years PFTLE and IFTLE have brought copper protrusion to the forefront as an issue [see "Researchers Strive for Copper TSV Reliability" Semi Int, 12/03/2009] and reported on technical solutions as they appeared from IMEC [see IFTLE 6 "Cu-Cu and IMC Bonding Studies at 2010 ECTC…"]; TSMC [see IFTLE 34, "3DIC at the 2010 IEDM"] and others. IME has now reported on their study of 5 um x 50 um Cu TSV as they were annealed from 250 to 450C.

Cu expands vertically because it is constrained by the surrounding silicon substrate. Because it expands plastically it does not return to its original length when the sample is cooled down.

(Click on any of the images below to view the full-size version)

The effects of anneal temp, anneal time, via diameter and via depth are shown below where "room temp" refers to the protrusion present after anneal and return to room temperature and high temp refers to protrusion after anneal while still at the elevated temperature. As with previous studies they found that CMP after anneal retards any further protrusion if the temperature is again elevated.

Bottom line is that protrusion is minimized by small diameter, low aspect ratio TSV.

Samsung System LSI Division has also looked at the Cu protrusion issue and report similar results i.e that Cu protrusion can be reduced by heat treatment before CMP and that Cu protrusion and delamination strongly depend on TSV dimensions.

When the via diameter was in zone A all the vias showed high Cu extrusion and via delamination, but TSV diameters from zone B showed no problems.


Micro-cracking caused by Lateral Extrusion

Conference Chair Koyanagi and co-workers at Tohoku Univ also examined TSV dimensions and the effect of high temp annealing. An array of Cu TSV with diameters ranging from 3 to 30 um at three different pitches were annealed from 200 to 400C. Both the lateral and vertical protrusion of the copper was monitored.

Again larger diameter TSV (at a constant depth) show higher extrusion, but also that lateral extrusion (extrusion in the x-y after Cu has protruded from the surface) increased with anneal temp. For example 5 um TSV on a 10 um pitch extrude laterally 2 um at 400C. This would put them within 1 um of touching! Stresses induced by the TSV also result in microcracking "…on the periphery of the TSV array and in between the TSV." Careful choice of TSV size and pitch is recommended.

Cu-Cu Direct Bonding

Copper-copper direct bonding continues to be a popular topic due to the promise of fine pitch, low resistance interconnect which are more mechanically reliable than IMC bonding (Cu-Sn-Cu) and should show less electromigration issues. Such processes are currently limited by the required bonding time / temperature which are usually reported as 30 min / 350-400C. The holy grail appears to be a thin die Cu-Cu thermo compression bonding process which requires low bonding temp and pressure.

IMEC and TSMC have studied the direct Cu-Cu bonding of 5 x 40 um TSV with (3) different configurations ; (1) no nail head exposed (Cu CMP’d flat with the oxide surface; (2) flat nail head (cu CMP’d flat and then oxide recessed and (3) natural nail head (stop grind short of the nail head, pull back oxide revealing "dome" shaped copper protrusion. The matching landing pad is a Cu surface CMP’d flat with the oxide surface. After bonding they observed that the "no nail head exposed" and the "flat nail head" sample s delaminated even when the bonding temp and or the pressure was increased. They assumed failure was due to the low % area that is actually used to bond (less than 1%). So, what is good for the design (less than 1% of the area occupied by TSV) is not good for the strength of bonding. The dome bonding was better due to its ability to deform. IFTLE interprets this as an ability of the domed structured to deform allowing shorter TSV to now touch their pads and bond. IFTLE also thinks this is a good reason to look at hybrid bonding schemes such as proposed by Ziptronix [see PFTLE 48, "Opening the Kimono, Ziptronix gives details on DBI Process"] and CEA Leti [see PFTLE 103, "Show me the Copper"]

Stacking of Ultrathin Die

Standard 3DIC thickness has focused around 50 um for the last few years. IMEC has now shared their results of ultrathin (25 um) die stacking.

After temporary bonding and grinding, oxide is pulled back for Cu TSV reveal. The revealed "nail heads" are passivated with 3 um BCB and reconfigured with Cu/BCB RDL. Cu/Sn bumps are then fabricated on the landing pads. The 25um thick die are diced while still bonded to the carrier. They note that "this is required to have enough mechanical support during stacking"

Both NUF and WUF were looked at for underfill solutions. NUF is unfilled polymer dispensed onto the landing die prior to bonding and WUF is filled underfill film laminated to the thinned wafer while still on the carrier.

Issues with NUF were: (1) underfill trapped between the bumps;(2) voids between top and bottom die and (3) induced topography due to underfill shrinkage on cure. Shrinkage of the underfill upon curing and the CTE difference between a microbump and the underfill cause a bending of the die over the ubump connection. For an unfilled underfill and a 25um thick die a 40% increase in the drain current was observed to occur.

After several failed tries, they decided to focus on WUF with 60% filler loading. WUF was vacuum laminated onto the die and gave much better topography and the use of a filled underfill resulted in reduced stress.

They also found that increase in the die thickness from 25 to 50 um resulted in a stress reduction of 3X. Final conclusions were that 50 um thickness die were currently much better option for scalable manufacturable process and that reduction in the TSV diameter from 5 to 3 um will reduce the required KOZ by 64%.

Wireless Product with Design Partitioning

ST Micro and CEA Leti described their program to partition the digital and analog functions of a HD video transmitter onto separate die and stack them using Cu TSV and ubumps.

TSV are 10 um with a 40 um pitch and wafers are 80 um thick. Cu pillar interconnect are 25 um dia and 30 um high. Reliability tests were done at package level using JEDEC level 3. No delamination and no electrical failures were obtained after 1000 cycles.

————–The next IEEE 3DIC Conference will be held in the fall of 2013 in San Francisco————–

Coming up in IFTLE :
-advanced packaging from InterNepcon Japan
-3D as the ISSCC
-detailed coverage on the IMAPS Device Packaging Conference and more

For all the latest in 3D IC and advanced packaging stay linked to IFTLE……………………….

IFTLE 90 Highlights from the IEEE 3DIC 2012 Japan

The 2011 IEEE 3DIC Conference scheduled for Japan, as most of you know, was postponed due to the earthquake and Tsunami issues Japan experienced last year. The good news is that the conference which was postponed till Feb 2012 was held a few weeks ago and was a huge success. More than 250 attendees shared 32 presentations and more than 65 posters concerning the latest breakthroughs in 3D stacking technology.

In the next two blogs we will review what IFTLE considers some of the more important presentations and posters.

Effect of Sidewall Roughness on Leakage Current

Fujitsu has looked at the effect of sidewall roughness on leakage current comparing Bosch etched TSV to ULVAC NLD etched TSV (discussed below). Bosch etched scallops were 72 nm deep and 280 nm long while the NLD etched TSV were ultra smooth. 500 nm of SiON insulator was deposited by low temp PECVD (150C) followed by PVD of 50 nm of TiN and 50 nm of TI to serve as Cu barriers followed by 200 nm of Cu seed.

Leakage current between TSV was measured after annealing for 5 min at from 200 to 400C. Leakage current of NLD is lower than the bosch etched TSV initially and is less than 100x smaller than Bosch after anneal at 400C. These results are correlated with cracking of the insulation layer and subsequent migration of copper. It appears as though sidewall roughness initiates crack growth. Since anneal at 400+ is recommended to reduce the effects of copper protrusion [see IFTLE 6 "Cu-Cu and IMC Bonding Studies at 2010 ECTC…"], it is recommended by IFTLE that such leakage current experiments be run when optimizing Cu anneal process during TSV fabrication to insure integrity of the barrier and insulation layers after processing.

(Click on any of the images below to enlarge them.)
Effect of Sidewall Roughness on Copper migration

Koyanagi and his co-workers examined the influence of copper contamination on device reliability and found that when Bosch scalloping is high, conformal deposition of the dielectric layer and barrier layer is difficult and increases the likelihood of Cu atom diffusion through the thinned barrier on the point of the scallop especially during the thermal temperatures reached during post process thermal anneal.

They fabricated Si trenches with 5 um diameter and 10 um depth with sidewall scalloping of 30 and 200 nm. 100 nm thick oxide and Ta barriers of 10 or 100 nm where deposited by sputtering. This was followed by a 200 nm thick copper seed.

Electrical results showed the 10 nm Ta barrier failed to resist Cu migraion for both the shallow and severe scallops.

ULVAC non Bosch scallop free TSV

The magnetic loop discharge plasma (NLD plasma) used by ULVAC can be used for silicon or oxide etching. The etch profile is controlled by the SF6/O2 ratio. Sidewall roughness of less than 15 nm is obtained.

IMEC and Suss Demonstrate Integration of ZoneBond Process

IMEC has demonstrated integration of the ZoneBond process on their Suss XBC300-LF temporary bond cluster and DB12T peel debonder. The Zone bond process has been described before [see IFTLE 61, "Suss 3D Workshop at Semicon West"]

The bonding material is coated on the wafers in 19.2 +/- 0.4 um thickness. Scanning acoustic microscopy shows that the bonding to a silicon carrier is void free.

After thinning and backside processing the bonded wafers are soaked for a few hours in the adhesive solvent and laminated onto a UV sensitive dicing tape. The carrier wafer is then "peeled" off the device wafer.

The remaining glue is then removed while the device wafer is held on the film frame. Devices are diced subsequent to cleaning.

For all the latest in 3DIC and advanced packaging stay linked to IFTLE………………………

IFTLE 89 Advances in CMOS Image Sensing

It was 5 years ago in the the fall of 2007 when Toshiba first announced the commercialization of TSV in a CMOS image sensor (CIS) [see "PFTLE 12 Imaging Chips with TSV announced…"; PFTLE 16, "More TSV Commercial capacity on line"; PFTLE 24, "ST Micro announces more CMOS Image Sensor Packaging Capacity with TSV"; PFTLE 57 "Toshiba CIS Camera Module Details…"; etc]. The next step of circuit repartitioning and stacking was interrupted by "back side imaging" [BSI], which flipped the chip over and let the light enter through the least obstructed side to let more light in per pixel, which is really important as the pixels are getting smaller and smaller. [see PFTLE 40, "Backside Illumination next for Next Generation CMOS Image Sensors"; PFTLE 46, "on Mechanical Bulls, Rollercoasters and CIS with TSV."

For those of you needing a refresher about how this is done, below is a process flow that Yole Developpment released in 2010 starting with SOI wafers.

(Click on any of the images to enlarge them)

From SOI to Bulk Silicon

Last spring Chipworks announced that Sony had moved from an SOI based process to a bulk silicon process. [link] It is unclear yet whether this will become an industry wide trend.

Chipworks found that while previous Sony BSI sensors they had analysed were fabricated using an SOI starting wafer, with the 1.1µm BSI generation, Sony migrated to using bulk silicon substrates instead of SOI. Chipworks commented that SOI is a more costly substrate, but likely an easier process to implement. They presume that Sony was able to identify the yield limiting contributions from the bulk polishing process, and fine tune the yield to achieve a high yielding and very cost effective process. This process would require a SiO2 bonding process.

In late August Ziptronix announced that Sony had taken a license on Ziptronix’s patents regarding oxide bonding technology for backside illumination imaging sensors [see IFTLE 65, "…Ziptronix Licensing News"]

With BSI fully implemented, it appears that practitioners have now turned their sites back to repartitioning the circuitry and creating true stacked 3D IS structures.

Sony reveals stacking in BSI CMOS Image Sensor

In January Sony announced that it had developed "the next generation back-illuminated CMOS image sensors" by separating the pixel section containing the back-illuminated structure pixels from chips containing the circuit section for signal processing, which is in place of supporting substrates for conventional back-illuminated CMOS image sensors. [link] This results in:
-More compact image sensor chip size
-Higher image quality of the pixel section by optimizing the manufacturing processes for superior image quality on the pixel layer
-Faster speeds and lower power consumption by adopting the leading edge processes for the circuit section

By this stacked structure, large-scale circuits can now be mounted keeping small chip size. Furthermore, as the pixel section and circuit section are formed as independent chips, a manufacturing process can be adopted, enabling the pixel section to be specialized for higher image quality while the circuit section can be specialized for higher functionality, thus simultaneously achieving higher image quality, superior functionality and a more compact size. In addition, faster signal processing and lower power consumption can also be achieved through the use of leading process for the chip containing the circuits. Basically some of the attributes that we have been ranting about for 3DIC for the past 5 years. Samples will be shipped starting in March, 2012.

Poly SI TSV found in the Toshiba BSI CIS from Fujifilm Camera

Chipworks reverse engineering analysis of the Toshiba HEW4 BSI TCM5103PL 16 Mp, 1.4um Pixel Pitch CIS found inside Fujufilm F550 EXR camera. The CIS was fabricated using the Toshiba Oita 300 mm wafer line, using a 65 nm logic process adapted to BSI image sensor production. Fellow SST blogger Dick James [link] was kind enough to share more of the details for our IFTLE readers.

With BSI, the I/O pads end up on the bottom side of the sensor silicon (which is bonded to a handle wafer so the pads are burried). To get to the pads, you need some means of creating a via through the silicon to the front side metal. Very high density arrays of polysilicon filled through silicon vias (TSVs), to form the electrical interconnect between the back side aluminum bond pads and the front side copper lines on the CMOS integrated circuits. These are the first true submicron TSVs that Chipworks has seen deployed in volume production.

Chipworks notes that: "…closely packed, poly-filled submicron TSV… technology is non-trivial to implement. Once mastered and with appropriate economies of scale in play, however, this advanced TSV process saves valuable silicon area and can reduce the size of the camera module."

Applied Materials Targets BSI Sensors Manufacturing

Applied Materials recently announced the Applied Producer Optiva CVD system aimed at the manufacture of BSI sensors. "Emerging BSI image sensor designs present a new opportunity for Applied Materials to provide customers with the technology they need to be successful in this rapidly growing market"

The Optiva low temperature process runs on their Producer platform, capable of depositing low temperature, conformal films that boost the low-light performance of the sensor while improving its durability. The system enhances the performance of the microlens by covering it with a tough, thin, transparent film layer that reduces reflections and scratches, and protects it from the environment. Importantly, the Optiva tool is the first CVD system to enable 95% conformal deposition at temperatures less than 200C. As typical bonding adhesives have thermal budgets of approximately 200C, all subsequent processing on these temporarily bonded wafers must be done below 200C.

iSuppli estimates that 75% of all smartphones will be fitted with BSI sensors in 2014, up from just 14% in 2010. 2014 demand is estimated at 300 million units.

Coming up in IFTLE:
– Advanced packaging highlights from NEPCON Japan
– 3D highlights from the IEEE 3DIC Conference in Japan

For all the latest in 3D IC integration and advanced packaging stay linked to IFTLE……..

Hope to see you all at the IMAPS Device Packaging Conference in Arizona next month!
IFTLE will be hosting a session on 2.5/3D Infrastructure development.

IFTLE 88 Apple TSV Interposer rumors; Betting the Ranch ; TSV for Sony PS-4; Top Chip Fabricators in Last 25 Years

Apple about to Join the 2.5D TSV club?

Click on any of the images to enlarge.

It’s not news that Apple has been considering moving fabrication of its A6 ARM processor from its current supplier Samsung to TSMC. The "A6," was scheduled to appear in the iPad 3 later in 2012. [link]

By mid 2011 there were many reports that TSMC had started tooling up its 28 nm process to fabricate the A6 for Apple. The Apple A6 will be based on an ARM Quad Core Processor.

Mid summer rumors were that the A6 would use "Intel 3D technology" technology , but recall this was the period in which several publications were totally confused over the difference between a finFET and a 3DIC [ see IFTLE 62, "3D and Interposers – Nomenclature Confusion…"] so I wasn’t really sure what they meant.

More recently statements like "The A6 is reportedly being built on TSMC’s new 28nm process and incorporates the company’s 3D chip-stacking technology. The use of through-silicon-vias (TSVs) and chip stacking could significantly improve the A6’s power consumption compared to conventional planar silicon, but it adds a layer of complexity that could benefit from additional ramp time" make it much clearer that Apple is truly looking for 3D IC technology for their next generation products.[link]

In fact EE Times has just reported that TSMC has had to do a "respin" on their A6 processor design and that "one potential reason of the respin is that TSMC plans to use 3-D stacking technologies along with its 28-nm manufacturing process in the production of the A6 for Apple. The use of a specialized silicon interposer and bump-on-trace interconnect may produce specific requirements in the main processor die." [link]

Thus IFTLE now finds that it is highly likely that 2012 will bring us at least announcements (if not actual production) from Apple that their next processor will make use of 3D IC technology.

How many IC Fabs are Ready to "Bet the Ranch"

Growing up as part of the first TV generation in the USA (my family got its first TV in 1954 when I was in kindergarten), many psychologists have said that the impact of TV on my generation was profound. After Howdy Doody (a puppet show) and Crusader Rabbit (the first animated TV show by the group that later brought us the cult classic Rocky & Bullwinkle) my favorites shows were the westerns like "Have Gun will Travel" and "Rawhide" (which gave us Clint Eastwood). Part of all great westerns is the poker game in the saloon. The "good guy" (always in the white hat) is always the underdog and the "bad guy" (in the black hat) always has a table full of chips. When the good guy finally gets a hand that cannot be beat, the bad guy always bets more chips than the good guy has left on the table. That’s when the good guy literally "bets the ranch (or maybe the farm)" on his unbeatable hand. Why he happened to be carrying the deed to his property in his back pocket was never actually explained. That phrase, "betting the ranch" has survived into today’s lexicon and that’s what a lot of microelectronic companies will be asked to do if they want to move forward with advanced technologies.

IC Insights recently reported that Intel and Samsung plan $12.5 billion, $12.2 billion in capex respectively which is more than double the 2012 capex of TSMC (budgeted $6.0 billion). Combined, Intel, Samsung, and TSMC are forecast to account for about half of the total semiconductor capex spending in 2012.

Samsung currently serves as Apple’s foundry partner for the A4 and A5 application processors used in iPad tablet computers, iPhones, and iPod touch devices. Besides serving as a foundry partner for Apple, Samsung is aggressively ramping its in-house application processor business as demand increases for its smartphones, tablet PCs, and other mobile/media related devices. Meanwhile, the remaining $5.7 billion of Samsung’s capex budget will be applied to the production of memory ICs, with a good portion of the funding likely to be used to boost capacity for NAND flash memory.

Intel is nearing completion of, and will soon be equipping and ramping production at, three new wafer fabs located in Chandler, AZ, Hillsboro, OR, and in Ireland. The company plans to begin 14nm production in Chandler when that fab opens in 2013. The new Hillsboro facility will focus on process development using 450mm wafers when it begins operations in 2013. Meanwhile, several fabs will begin 22nm production in the second half of 2012.

Samsung, Intel, and TSMC are positioning themselves as the strongest and most dominant IC suppliers in the industry and if anyone want to challenge that — well they may have to bet the ranch! Weaker suppliers will be forced out of the business and a higher percentage of capex spending will be in the hands of the fewer remaining players.

Sony says it wants TSV packaging for updated Playstation 3

Masaaki Tsuruta, CTO of Sony Computer Entertainment, says that the company is working on a system-on-chip (SoC) for their fourth generation console which will not be called PlayStation 4. [link] The engine that powered the PS3 reportedly cost $400MM to develop; the main SoC for the new console could be the first $1bn hardware design project.

Tsuruta indicated that there is likely to be a 3D stack incorporating TSV technology in the next generation console. Sony’s target of no more than 50ms latency even for 8k x 4k resolution at 300fps, clearly points to the need for a highly integrated TSV-based package although Tsuruta warns "We will have to work with a lot of third-party partners to make these things happen."

Noting the recent difficulties that several fabs are having trying to achieve viable yields at 28nm, Tsuruta commented that he believes that these problems are now moving towards a resolution.

Semiconductor Leaders Over the Last 25+ Years

Our friends over at IC Insights recently put together a Look at the Semiconductor Industries top 10 sales leaders over the past 25+ years. In case you haven’t seen this, I thought you might like to take a look. You can interpret these results without any help from me.

For all the latest on 3D IC and advanced packaging stay linked to IFTLE……………………

IFTLE 87 JEDEC Wide IO Stds, Elpida 3D shipments start while merger rumors loom , Renesas joins 3D wide IO Club; Comments from IBM on 22 nm & Beyond

JEDEC Wide IO Mobile DRAM Standards
We have been talking about the JEDEC wide IO DRAM standards for a few years. [see IFTLE 19, "Semicon Taiwan 3D Forum Part 2"]

Wide I/O mobile DRAM using 3D stacking with TSV provides "double the bandwidth at the same power, or can cut power in half at the same bandwidth" compared to LPDDR2 and LPDDR3. It is reportedly "particularly suited for applications requiring increased memory bandwidth up to 17GB/second, such as 3D gaming, HD video and user multitasking."

Click on any of the images below to enlarge them.
Well, the spec is finally finished and JESD229 Wide I/O Single Data Rate (SDR) can be downloaded from the JEDEC website [link]

Wide I/O mobile DRAM enables 3D stacking with TSV interconnects and memory chips directly stacked upon a System on a Chip (SoC).


The standard defines features, functionalities, AC and DC characteristics, and ball/signal assignments. The specification employs "LPDDR2-like" commands and timing parameters. The 512-bit memory interface has four independent 128 bits wide channels each operating at clock speeds to 266 MHz. resulting in a total bandwidth of 17 Gb/s for wide I/O SDRAMs (4.26 Gb/s/channel). The specification supports as many as four memory banks per channel, allowing die stacking of up to four wide I/O SDRAM die. The specification calls for 1.2V signal levels.

The specification also standardizes:
– Boundary scan testing (Boundary scan logic is integrated into the die for contact and I/O testing, providing full test coverage for contacts, drivers and receivers.)
– Post-assembly DRAM test. (DRAM can be tested separately from the logic chip it’s packaged with.)
– Mechanical layout of the chip-to-chip interface.
– Memory thermal sensor locations for DRAM, to provide reliable operation given thermal gradients introduced by logic chips.
JESD229 does not control the bonding configuration between the memory and logic chips – i.e. side-by-side with interposer, or stacked memory on top of logic.

The next generation of this Wide I/O SDRAM specification, already underway, will reportedly deliver eight times the performance and support 2.5D assembly.

The JEDEC committee expects wide IO memory to be in mass production by 2014.

Over the past 12-18 months we have seen wide IO adopted by all of the major memory players. Samsung [see IFTLE 40, "Samsung wide IO DRAM…"]; Elpida [see IFTLE 57 "Elpida and MOSIS Ready for 3DIC; TSV Going "Where the Sun Don’t Shine"]; Micron [see IFTLE 38 "…of Memory Cubes and Ivy Bridges"]

Elpida Starts Sample Shipments of wide IO Mobile DRAM
In late December Elpida announced that it has begun sample shipments of 4-gigabit Wide IO Mobile DRAM which will deliver increased performance and lower power consumption, aiming these products at the smartphone and tablet device markets.

By using x512-bit, a data width that is more than 10 times larger than the width for existing DRAMs, they enable a data transfer rate of 12.8 gigabytes per second (GB/s) per chip while operating at a low speed of 200MHz. The reduced DRAM speed results in approximately 50% less power consumption compared with DDR2 Mobile RAM (LPDDR2), currently the leading DRAM choice for mobile devices, configured at the same transfer rate. Elpida plans to begin volume production in 2012. Future plans are to develop two-layer 8-gigabit and four-layer 16-gigabit high-density packages for addition to the company’s product line-up.[link]

Elpida Facing Global Memory Consolidation
There are only 6 significant DRAM suppliers left in the world: Samsung, Hynix, Micron, Elpida, Nanya, and Powerchip. Elpida, born of the consolidation of the DRAM businesses of NEC, Mitsubishi, and Hitachi in 1999, is the last remaining Japanese DRAM manufacturer. "Elpida" is Greek for "hope" and like the Greek economy, Elpida, the Japanese memory company, appears to be out of hope and financially on its last leg. The major problem is that many of Elpida’s competitors have NAND to fall back on when the DRAM market is doing badly, but Elpida has only DRAM to keep itself alive.

IFTLE views Elpida as one of the bright stars of 3DIC. Last fall IFTLE discussed the Business Week proposal that memory company consolidation was on the horizon [see IFTLE 69, "Cell Phones and Memory Consolidation"], how Elpida’s financial outlook was grim and how Toshiba was the likely merger candidate. Digitimes reports that Elpida and Toshiba are in talks to merge their business operations. The merger is being "pushed" by the Japanese government, which reportedly wants Japan to keep its DRAM technology ownership on shore.

[see Digitimes Jan 3rd, 2012 "Elpida and Toshiba Reportedly in Integration Talks"]

Others are pointing towards talks between Elpida, Micron, and Nanya. Last week Reuters reported that Elpida is in talks to merge with U.S. firm Micron Technology and Taiwan’s Nanya Technology. Elpida said it would not comment on rumors and speculation. [link]

Micron has a 10-year agreement with Nanya (until 2018) to co-develop new DRAM chip technology. The two also run contract DRAM maker Inotera Memory via a joint venture. Nanya has posted losses for seven consecutive quarters but has been kept going by funds from its parent, the Formosa petrochemical group.

Renesas to Commercialize TSV Technology for Wide I/O DRAM-compatible Mobile SoCs
At the IC Packaging Technology Expo at NEPCON Japan in Tokyo, Renesas announced that it will apply TSV technology to its mobile SoCs so that they will support Wide I/O DRAM starting with mobile phone products. The DRAM will be stacked on the back of the SoC via 1,200 microbumps. The company plans to contract out the production of advanced SoCs to a silicon foundry as well as the production of TSV. [link]

IBM Comments on 22 nm and Beyond
Subu Iyer, IBM fellow, noticed that I have been using the IC consolidation slide (below ) shown by Handel Jones of Int Business Strategies (IBS) at the Semi ISS meeting in 2010. [see PFTLE 121, "IC Consolidation, Node Scaling and 3DIC"]

Dr. Iyer informs IFTLE that IBM does not build a fab for every node except when there is a change in wafer size. "Our approach is to achieve a soft transition from one node to the other. As you may know we develop technology not just for IBM but also for Samsung, GF,ST and many others … so as these development programs are complete, the SOI technologies are manufactured at IBM and the bulk technologies are transferred to our partners. Our current fab has transitioned from 130 to 90 to 65 to 45 to 32 nm in the last 10 years or so … we expect this approach to continue. It is unlikely that we will outsource chips that we make for our mainframes, supercomputers etc. We only outsource OEM chips." IFTLE thanks Subu for that clarification.

For all the latest on 3D IC and advanced packaging stay linked to IFTLE…………………